Equipment List: Difference between revisions
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===== Ion Beam Lithography ===== | ===== Ion Beam Lithography ===== | ||
* [[ORION NanoFab: Helium, Neon & Gallium FIB | He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)]] | * [[ORION NanoFab: Helium, Neon & Gallium FIB | He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)]] | ||
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | Ga-FIB, SEM, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab]] | |||
===== Optical Lithography ===== | ===== Optical Lithography ===== | ||
* [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6]] | * [[Contact Mask Aligners: MA6 & MA6/BA6 | Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6]] | ||
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* [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]] | * [[Nanoscribe PPGT: Microscale 3D Printer | Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT]] | ||
* [[Optical Lithography Resources]] | * [[Optical Lithography Resources]] | ||
== Deposition == | == Deposition == | ||
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* [[Labline: Electron Beam Evaporator | Metals (Al, Au, Pt & Ti): Kurt J Lesker Labline Electron Beam Evaporator]] | * [[Labline: Electron Beam Evaporator | Metals (Al, Au, Pt & Ti): Kurt J Lesker Labline Electron Beam Evaporator]] | ||
<!--- * [[CHA: Electron Beam Evaporator | Metals & Oxides: CHA Industries Mark 40 Electron Beam Evaporator - DECOMMISSIONED]] ---> | <!--- * [[CHA: Electron Beam Evaporator | Metals & Oxides: CHA Industries Mark 40 Electron Beam Evaporator - DECOMMISSIONED]] ---> | ||
* [[Carbon Evaporator | Conductive thin film deposition: Leica EM ACE600 Carbon Evaporator & | * [[Carbon Evaporator | Conductive thin film deposition: Leica EM ACE600 Carbon Evaporator & Sputter Coater]] | ||
* [[AJA Orion ATC Series Electron Beam Evaporator | Metals & Oxides: AJA Orion ATC Series Electron Beam Evaporator]] | * [[AJA Orion ATC Series Electron Beam Evaporator | Metals & Oxides: AJA Orion ATC Series Electron Beam Evaporator]] | ||
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===== Chemical Vapor Deposition (CVD) ===== | ===== Chemical Vapor Deposition (CVD) ===== | ||
* [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II]] | * [[FlexAL II: Atomic Layer Deposition (ALD) | Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II]] | ||
* [[ | * [[Oxide/Nitride Deposition: Oxford Instruments PlasmaPro System 100 PECVD | Oxide/Nitride Deposition: Oxford Instruments PlasmaPro System 100 PECVD]] | ||
* [[Silicon Deposition: Oxford Instruments Plasmalab System 100 PECVD | Silicon Deposition: Oxford Instruments Plasmalab System 100 PECVD]] | |||
===== Dielectric Packaging / Moisture Barrier ===== | ===== Dielectric Packaging / Moisture Barrier ===== | ||
* [[Parylene Coater | Parylene Coater: Para Tech LabTop 3000]] | * [[Parylene Coater | Parylene Coater: Para Tech LabTop 3000]] | ||
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* [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]] | * [[Light Microscope with Spectroscopic Reflectometer | Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer]] | ||
* [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]] | * [[Spectroscopic Ellipsometer | Spectroscopic Ellipsometer: Woolam M-2000]] | ||
* [[Profilometer: Keyence VK-X3000 | Optical Profilometer: Keyence VK-X3000]] | |||
===== Sample Preparation for Microscopy ===== | ===== Sample Preparation for Microscopy ===== | ||
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===== Stubs for specimen mounting ===== | ===== Stubs for specimen mounting ===== | ||
* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions. | * Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions. | ||
<!---* [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips]---> | |||
== Wet Chemistry == | == Wet Chemistry == | ||
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* [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]] | * [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]] | ||
===== Metrology ===== | ===== Metrology ===== | ||
* [[Dektak 3ST: Profilometer | Profilometer: Veeco Dektak 3ST]] | * [[Profilometer: Keyence VK-X3000 |Optical Profilometer: Keyence VK-X3000]] | ||
* [[Dektak 3ST: Profilometer | Stylus Profilometer: Veeco Dektak 3ST]] | |||
* [[Digital Microscope Keyence VHX7000 | Digital Microscope and Camera: Keyence HVX-7000]] | * [[Digital Microscope Keyence VHX7000 | Digital Microscope and Camera: Keyence HVX-7000]] | ||
* [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]] | * [[Electrical Probing Station | Electrical Probing Station: Cascade Microtech M150]] | ||
Latest revision as of 22:21, 22 January 2026
NOTE: For EQUIPMENT TRAINING, make a training request via FBS. See link to instructions: FBS Instructions
Lithography
Electron Beam Lithography
- Electron Beam Pattern Generator: Raith EBPG 5200 (100 kV)
- Electron Beam Pattern Generator: Raith EBPG 5000+ (100 kV)
- Nanometer Pattern Generation System: Thermo Fisher Quanta 200F SEM with NPGS (1-30 kV)
Ion Beam Lithography
- He/Ne/Ga-FIB: Zeiss ORION NanoFab with Raith ELPHY MultiBeam Pattern Generator (5-40 kV He & Ne, 1-30 kV Ga)
- Ga-FIB, SEM, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab
Optical Lithography
- Contact Mask Aligners: Suss MicroTec models MA6 & MA6/BA6
- i-Line Wafer Stepper: GCA model 6300
- Nano Imprint Lithography: NILT CNI-PV 2.1
- Direct-Write Laser System: Heidelberg Instruments DWL-66
- Two-Photon Lithography (aka Microscale 3D Printing): Nanoscribe Photonic Professional GT
- Optical Lithography Resources
Deposition
Evaporation
- Metals (Al, Au, Pt & Ti): Kurt J Lesker Labline Electron Beam Evaporator
- Conductive thin film deposition: Leica EM ACE600 Carbon Evaporator & Sputter Coater
- Metals & Oxides: AJA Orion ATC Series Electron Beam Evaporator
Sputtering
- Dielectric Sputter System: AJA International ATC Orion 8
- Chalcogenide Sputter System: AJA International ATC Orion 8
Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD): Oxford Instruments FlexAL II
- Oxide/Nitride Deposition: Oxford Instruments PlasmaPro System 100 PECVD
- Silicon Deposition: Oxford Instruments Plasmalab System 100 PECVD
Dielectric Packaging / Moisture Barrier
Etching
Dry Etching
- Silicon Etcher: Oxford Instruments DRIE System 100 Bosch & Cryo ICP-RIE
- III-V Material, Metal & Silicon Etcher: Oxford Instruments System 100 ICP-RIE
- Dielectric Material Etcher: Oxford Instruments Dielectric System 100 ICP-RIE
- Silicon, III-V Material & Organics Etcher: Plasma-Therm Dual Chamber RIE
- Oxygen & Argon Plasma Cleaner: PIE Scientific Tergeo Plus ICP- & CCP-RIE
- XeF2 Etcher for Silicon
Wet Etching
Microscopy
KNI Microscopy Policies
Microscopy High Performance PC
Guide to Choosing KNI SEMs & FIBs
Focused Ion Beam (FIB) Systems
- Helium, Neon & Gallium FIB: Zeiss ORION NanoFab
- SEM, Ga-FIB, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab
Scanning Electron Microscopes (SEMs)
- Sirion: SEM & EDS
- SEM, ESEM, Lithography & Probe Station: Thermo Fisher Quanta 200F
- SEM, Ga-FIB, EDS, GIS & Omniprobe: Thermo Fisher Nova 600 NanoLab
Scanning Probe Microscopes
Optical Characterization
- Digital Microscope and Camera: Keyence HVX-7000
- Fluorescence Microscope: Olympus IX81
- Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer
- Spectroscopic Ellipsometer: Woolam M-2000
- Optical Profilometer: Keyence VK-X3000
Sample Preparation for Microscopy
- Conductive thin film deposition: Leica EM ACE600 Carbon Evaporator & Metal Sputter Coater
- Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface
Stubs for specimen mounting
- Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.
Wet Chemistry
Wet Chemistry Main page
- Facilities Procedures & Safety
- List of Chemicals Supplied by KNI with Safety Data Sheets
- List of Chemicals Approved for use in the KNI cleanroom (not supplied by KNI) with Safety Data Sheets
- Requesting New Chemicals for use in the KNI cleanroom
Wet Chemistry Safety page
- PPE Overview
-Hazardous Waste Handling and Labeling
-Decanting Chemicals
-Hot Plate Rules
-KNI Buddy System
-Secondary Containment and Other Best Practices.
Wet Chemistry Resources page
- Contains fabrication recipes and procedures.
Support Tools
Equipment Status
Thermal Processing
- Tube Furnaces: Tystar Tytan 1 & 2 (Wet & Dry Oxidation and Annealing)
- Rapid Thermal Processing: Solaris 150
Substrate Processing
Device Processing
Metrology
- Optical Profilometer: Keyence VK-X3000
- Stylus Profilometer: Veeco Dektak 3ST
- Digital Microscope and Camera: Keyence HVX-7000
- Electrical Probing Station: Cascade Microtech M150
- Spectroscopic Ellipsometer: Woolam M-2000
- Light Microscope: Olympus BX51M with Filmetrics Spectroscopic Reflectometer
- Light Microscope Nikon L200 / Nikon Camera - Nikon L200/L200D Manual, Nikon L200 Operation Quick Reference