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26 October 2026
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20:36 | Oxide/Nitride Deposition: Oxford Instruments PlasmaPro System 100 PECVD 4 changes history +7 [Kmmckenz (4×)] | |||
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20:36 (cur | prev) −4 Kmmckenz talk contribs | ||||
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20:36 (cur | prev) −29 Kmmckenz talk contribs | ||||
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20:28 (cur | prev) +14 Kmmckenz talk contribs Tag: Visual edit: Switched | ||||
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20:27 (cur | prev) +26 Kmmckenz talk contribs (→Manufacturer Manuals) Tag: Visual edit | ||||
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20:34 | Silicon Deposition: Oxford Instruments Plasmalab System 100 PECVD 4 changes history +30 [Kmmckenz (4×)] | |||
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20:34 (cur | prev) +25 Kmmckenz talk contribs (→Related Instrumentation in the KNI) Tag: Visual edit | ||||
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20:33 (cur | prev) +34 Kmmckenz talk contribs (→Allowed material in PECVD System) Tag: Visual edit | ||||
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20:29 (cur | prev) −37 Kmmckenz talk contribs | ||||
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20:28 (cur | prev) +8 Kmmckenz talk contribs | |||
21 October 2026
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19:37 | Oxide/Nitride Deposition: Oxford Instruments PlasmaPro System 100 PECVD 4 changes history −291 [Kmmckenz (4×)] | |||
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19:37 (cur | prev) +19 Kmmckenz talk contribs (→System Features) Tag: Visual edit | ||||
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19:25 (cur | prev) +80 Kmmckenz talk contribs (→SOPs & Troubleshooting) Tag: Visual edit | ||||
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19:24 (cur | prev) −127 Kmmckenz talk contribs (→Process Documents) Tag: Visual edit | ||||
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19:18 (cur | prev) −263 Kmmckenz talk contribs (→Applications) Tag: Visual edit | ||||
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m 19:13 | III-V Etcher and Atomic Layer Etching (ALE): Oxford Instruments PlasmaPro 100 Cobra 300 ICP-RIE with ALE 2 changes history −273 [Kmmckenz (2×)] | |||
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19:13 (cur | prev) −335 Kmmckenz talk contribs (→SOPs & Troubleshooting) Tag: Visual edit | |||
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19:12 (cur | prev) +62 Kmmckenz talk contribs (→Resources) Tag: Visual edit | |||
20 October 2026
| 00:34 | ICP-RIE: III-V, Metal & Silicon Etcher diffhist −68 Kmmckenz talk contribs (→Manufacturer Manuals: changed Labrunr link and reference) | ||||
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00:32 | III-V Etcher and Atomic Layer Etching (ALE): Oxford Instruments PlasmaPro 100 Cobra 300 ICP-RIE with ALE 7 changes history −80 [Kmmckenz (7×)] | |||
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00:32 (cur | prev) +61 Kmmckenz talk contribs (→Manufacturer Manuals) Tag: Visual edit | ||||
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00:25 (cur | prev) −128 Kmmckenz talk contribs (→Manufacturer Specifications) Tag: Visual edit | |||
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00:24 (cur | prev) −60 Kmmckenz talk contribs (→System Features) Tag: Visual edit | |||
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00:13 (cur | prev) +19 Kmmckenz talk contribs (→Manufacturer Manuals) Tag: Visual edit | |||
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00:07 (cur | prev) +39 Kmmckenz talk contribs (→Related Tools) Tag: Visual edit | |||
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00:06 (cur | prev) +4 Kmmckenz talk contribs (→Related Tools) Tag: Visual edit | |||
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00:02 (cur | prev) −15 Kmmckenz talk contribs (updated photo) | ||||