Process Recipe Library

From the KNI Lab at Caltech
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You can browse the available recipes below, by lab area. You can also browse directly within the KNI's Box directory. Note that the vast majority of recipes are being made publicly available; only a select few are password-protected for members of the Caltech community:

  1. All Content (requires login with a email address)
  2. Publicly available content (no login required)

Lithography Process Recipes

Electron Beam Lithography
Helium Ion Beam Lithography
Neon Ion Beam Lithography
Optical Lithography

Deposition Process Recipes

Chemical Vapor Deposition (CVD)

Etching Process Recipes

Dry Etching
Wet Etching

Microscopy Process Recipes

Focused Ion Beam (FIB) Systems
Scanning Electron Microscopes (SEMs)
Transmission Electron Microscopes (TEMs)

Thermal Processing

Wet Oxidation

Multi-Technique Fabrication Processes