From the KNI Lab at Caltech
Jump to navigation
Jump to search
| AJA Orion ATC Series Electron Beam Evaporator
|
[[image:|320x373px|center|]]
|
|
|
| Lab Location
|
B235C Steele
|
| Lab Phone
|
626-395-1539
|
| Manufacturer
|
AJA International
|
| Model
|
ATC Orion
|
|
|
Description
Applications
- Metal deposition
- Oxide deposition
- Lift-off
Resources
Equipment Status
SOPs & Troubleshooting
- [linkgoeshere KNI SOP]
- [linkgoeshere Troubleshooting Guide]
Tool Reservation Rules
|
Advanced Reservation (days) |
Limit per Reservation (hrs) |
Limit per week (hrs)
|
| Weekday |
7 |
6 |
18
|
| Weeknight |
7 |
8 |
18
|
| Weekend |
7 |
12 |
18
|
Video Tutorials
- [linkgoeshere General System Operation]
- [linkgoeshere In-Situ Crucible Exchange]
Specifications
Hardware Specifications
- Typical base pressure: <5E-9 Torr
- All dry pumping system (cryo & scroll pumps)
- Load-lock-equipped system with automatic wafer transfer
- Evaporation Source: 1x single emitter, 6-pocket e-beam evaporation source
- Pockets 1-4 allow in-situ crucible exchange through dedicated secondary load lock, allowing for crucible swap without breaking UHV chamber conditions.
- Accepts up to 1x 150mm wafer or smaller wafers/pieces
- Optional lift-off dome holds 4x 100mm wafers for batch processing
- Camera for E-Beam/Crucible observation during process
- Inficon CrystalSix(TM)
- 6-crystal QCM with automatic crystal switching in event of crystal fail or low Q. Enables long periods of maintained UHV conditions without requiring venting to exchange crystals
- Programmable deposition processes
Related Instrumentation in the KNI
Sputtering Systems
Electron Beam Evaporation Systems
Chemical Vapor Deposition