Wet Chemistry Resources
cleaning procedures links, breakout
Sample Cleaning Resources
https://cleanroom.byu.edu/clean
Wet Etching Resources
BYU Etch list https://cleanroom.byu.edu/wet_etch
find etch list book and other links http://transene.com/etch-compatibility/
Etch rates for micromachining processing http://ieeexplore.ieee.org/abstract/document/546406/
Etch rates for micromachining processing-Part II https://ieeexplore.ieee.org/document/1257354
UMich wet etch info http://lnf-wiki.eecs.umich.edu/wiki/Wet_etching
BYU Transene Wet Etch https://transene.com/etchants/
KOH, also find alternative: https://cleanroom.byu.edu/KOH
BYU etching guidance: https://cleanroom.byu.edu/chemical_etching.html
KNI Wet Etch Recipes Table
Table of Wet Etch recipes from KNI Papers
And general table from you, not from papers, maybe from recipes?
| Material | Etchant | Rate (nm/min) | Anisotropy | Selective to | Selectivity | Origin and Notes |
|---|---|---|---|---|---|---|
| Al | Al Etch Type D | ~1000 | Highly | Al | High | Transene |
Other Procedures
Liftoff
UCSB liftoff guidance: https://www.nanotech.ucsb.edu/wiki/index.php/Lithography_Recipes#Lift-Off_Techniques
Electroplating
Electroplating materials supplier: https://www.technic.com/chemistry
Safety Resources
https://cleanroom.byu.edu/acid_safety