| AJA Orion ATC Series Electron Beam Evaporator
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[[image:|320x373px|center|]]
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| Lab Location
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B235C Steele
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| Lab Phone
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626-395-1539
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| Manufacturer
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AJA International
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| Model
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ATC Orion
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Description
The AJA International ATC Orion Series system allows for programmable evaporation processes and a convenient ease of maintaining.
Applications
- Metal deposition
- Oxide deposition
- Lift-off
Resources
Equipment Status
SOPs & Troubleshooting
- [linkgoeshere Standard Operating Procedures (SOP)]
- [linkgoeshere Troubleshooting Guide]
Tool Reservation Rules
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Advanced Reservation (days) |
Limit per Reservation (hrs) |
Limit per week (hrs)
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| Weekday |
7 |
6 |
18
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| Weeknight |
7 |
8 |
18
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| Weekend |
7 |
12 |
18
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Video Tutorials
- [linkgoeshere General System Operation]
- [linkgoeshere In-Situ Crucible Exchange]
Specifications
Hardware Specifications
- Typical base pressure: <5E-9 Torr
- All dry pumping system (cryo & scroll pumps)
- Load-lock-equipped system with automatic wafer transfer
- Evaporation Source: 1x single emitter, 6-pocket e-beam evaporation source
- Pockets 1-4 allow in-situ crucible exchange through dedicated secondary load lock, allowing for crucible swap without breaking UHV chamber conditions.
- Accepts up to 1x 150mm wafer or smaller wafers/pieces
- Optional lift-off dome holds 4x 100mm wafers for batch processing
- Camera for E-Beam/Crucible observation during process
- Inficon CrystalSix(TM)
- 6-crystal QCM with automatic crystal switching in event of crystal fail or low Q. Enables long periods of maintained UHV conditions without requiring venting to exchange crystals
- Programmable deposition processes
Related Instrumentation in the KNI
Sputtering Systems
Electron Beam Evaporation Systems
Chemical Vapor Deposition