Wet Chemistry Resources

cleaning procedures links, breakout

Sample Cleaning Resources

https://cleanroom.byu.edu/clean

Solvent Cleans

• Acetone, IPA
  • Solvent for organics, IPA cleans remaining residues due to acetone's high evaporation rate
• Acetone, Methanol
  • Similar to above except Methanol is more toxic, and a polar chemical versus IPA which is non-polar
• Acetone, Methanol, IPA
• Acetone, Methanol, IPA, DI Water
• Remover PG (50°C), IPA
• Dichloromethane, IPA
  • Caution, high evaporation rate may leave residue and beakers get quickly condense water/ice
• Nanostrip?

Etching Cleans

RCA-1

Recipe steps or links

Wet Etching Resources

find etch list book and other links

Research Papers and Books

• Etch rates for micromachining processing

• Etch rates for micromachining processing-Part II

External Laboratories

• BYU Etching list

• UMich wet etch info

also find alternative:

• BYU KOH processing

• BYU Etching Guidance

• UCSB Wet Etching Recipes

Commercial Materials

• Transene Etch Compatibility Chart

• Transene Etchant List

KNI Wet Etch Recipes Table

Table of Wet Etch recipes from KNI Papers

And general table from you, not from papers, maybe from recipes?

Material	Etchant	Rate (nm/min)	Anisotropy	Selective to	Selectivity	Origin and Notes
KNI CHA Al	Al Etch Type D	~1000	Highly	Al	High	Matches Transene's expected rate
KNI PECVD SiO2	HF	~1000	Highly	SiO2	High	measured 10/19
KNI PECVD SiN3	Ex	~1000	Highly	SiN3	High	measured 10/19
KNI PECVD a-Si	KOH	~1000	Highly	Si	High	Link to KNI member's research paper

Other Procedures

Liftoff

• UCSB liftoff guidance

Electroplating

• Technic electroplating materials supplier

Safety Resources

Do we have materials to link to?

https://cleanroom.byu.edu/acid_safety

https://cleanroom.byu.edu/HF_safety

https://cleanroom.byu.edu/solvent_safety