Tube Furnaces for Wet & Dry Processing: Difference between revisions

From the KNI Lab at Caltech
Jump to navigation Jump to search
mNo edit summary
Line 23: Line 23:
== Resources ==
== Resources ==
===== SOPs & Troubleshooting =====
===== SOPs & Troubleshooting =====
* [https://caltech.box.com/s/BROKEN KNI SOP (Coming Soon)]
* [https://caltech.box.com/s/yrvj5tar3r2e2ldq9orm2bh5mlkavw05 KNI SOP (Coming Soon)]

Revision as of 16:27, 28 May 2019

Tystar Tytan Tube Furnaces 1 & 2
Tystar-Tytan-Tube-Furnaces.jpg
Instrument Type Support Tools,
Thermal Processing
Techniques Oxidation, Annealing
Staff Manager Nathan S. Lee
Staff Email nathslee@caltech.edu
Staff Phone 626-395-1319
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B235 Steele
Lab Phone 626-395-1532
Manufacturer Tystar Corporation
Model Tytan Horizontal
Diffusion Furnace

Description

The system is designed for processing up to one-hundred, 150 mm (6") wafers per tube. Tube 1 is designated for wet & dry oxidation using a flask evaporator. Tube 2 is designated for dry oxidation and annealing.

Applications
  • Dry & Wet oxidation
  • Annealing

Resources

SOPs & Troubleshooting
Retrieved from "https://www.lab.kni.caltech.edu/index.php?title=Tube_Furnaces_for_Wet_%26_Dry_Processing&oldid=1694"