EBPG 5200: 100 kV Electron Beam Lithography: Difference between revisions

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= Resources =
= Resources =
===== SOPs & Troubleshooting =====
===== SOPs & Troubleshooting =====
* SOP if there is short & long version ([https://caltech.box.com/s/4yv8f5att77k3zq1rm6p0mqhkd8quslh Short Version] | [https://caltech.box.com/s/xwjdudqdl793gkc5kl71zez5nnc5y2xb Long Version])
* SOP Type  ([https://caltech.box.com/s/4yv8f5att77k3zq1rm6p0mqhkd8quslh Short Version] | [https://caltech.box.com/s/xwjdudqdl793gkc5kl71zez5nnc5y2xb Long Version])
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol SOP if there is one main SOP]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol KNI's SOP]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Other SOP1]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Other SOP1]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Other SOP2]
* [https://caltech.box.com/s/1nmp75l3166vj9t1vwwpwu2zyfc4j6ol Other SOP2]

Revision as of 16:38, 23 April 2019

EBPG 5200
File:EBPG-5200-Research-Image.jpg
Instrument Type Lithography
Techniques Electron Beam Lithography,
Technique Two, Technique Three
Staff Manager Guy A. Derose, PhD
Staff Email derose@caltech.edu
Staff Phone 626-395-3423
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B233B Steele
Lab Phone 626-395-1531
Manufacturer Raith
Model {{{Model}}}
EBPG-5200-Instrument-Image.jpg

Description & Applications

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Type1 Applications
  • Application1
  • Application2
  • Application3
Type2 Applications
  • Application1
  • Application2
  • Application3

Resources

SOPs & Troubleshooting
Video Tutorials
Graphical Handouts
Presentations
Manufacturer Manuals

Specifications

Manufacturer Specifications
Mode 1 Specifications
  • Voltage Range: 0.5 to 30.0 kV
  • Aperture Sizes: 10 mm, 15 mm, 20 mmm, 30 mm
  • etc.
Mode 2 Specifications
  • Voltage Range: 5.0 to 30.0 kV
  • Current Range: 10 pA - 20 nA
  • etc.
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