Spectroscopic Ellipsometer: Difference between revisions
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== Description == | == Description == | ||
The J.A. Woolam M-2000 spectroscopic ellipsometer is a | The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' & ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability. | ||
===== Applications ===== | ===== Applications ===== | ||
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* Optical/electronic property analysis | * Optical/electronic property analysis | ||
* Surface roughness measurement | * Surface roughness measurement | ||
* Materials identification | * Materials identification | ||
== Resources == | == Resources == | ||
Revision as of 00:47, 22 May 2019
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Description
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n & k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.
Applications
- Thickness measurement
- Optical/electronic property analysis
- Surface roughness measurement
- Materials identification
Resources
SOP
Video Tutorials
- Ellipsometry & CompleteEASE:
Manufacturer Manuals
Specifications
Hardware Specifications
- CompleteEASE measurement and analysis software
- Spectral range: 370-1000nm
- Motorized stage enables automated mapping scans across up to 100mm wafers
- Automatic measurement angle control
- Automatic sample alignment
- 2mm spot size
- Removable beam focusing probes reduce spot size to 300um