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'''Overview of KNI Lab User Fees''' <br>
'''Overview of KNI Lab User Fees''' <br>
''Rates below are valid beginning October 1, 2022 and are subject to change''
''Rates below are valid beginning October 1, 2025 and are subject to change''


* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
* Caltech/JPL/Academic or Government lab members are '''NOT''' charged any Lab fees during days or months of non-use
* Lab users do '''NOT''' incur lab fees during days or months of non-use.
*Invoices are issued monthly.


'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access or further tool training is allowed.'''
'''Note: New users must submit a [[Membership_Forms | New User Form]] and attend general KNI Lab safety training before lab access is granted.'''


== Caltech & JPL Usage Rates ==
==Caltech & JPL User Rates==
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Discounted hourly rates are "unlocked" for hours that exceed the thresholds listed below. Tier C indicates the maxiumum number of hours a user will be charged in a given calendar month. Rates shown below do not include F&A/overhead. Overhead will be applied separately based on the PTA. Customers will be invoiced on a quarterly basis. Rates are valid beginning October 1, 2022 and are subject to change upon review at the end of FY23 Q2.
Below is a table of ''direct'' hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Rates do '''not''' include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA type. Rates are valid beginning October 1, 2025 and are subject to change.  
Rates below apply to internal Caltech or JPL users.


{| class="wikitable" style="width: 80%;"
{| class="wikitable" style="width: 90%;"
|-
!scope="col" style="text-align:left; width: 50%"| Equipment Name
!scope="col" style="text-align:center; width: 35%"| Lab Area
!scope="col" style="text-align:center; width: 15%" | Hourly Rate
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | General KNI Lab Use*
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37.50
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Raith EBPG 5000+ Electron Beam Writer
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford Dielectric System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford DRIE System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford III-V System 100 ICP/RIE
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Plasmatherm Reactive Ion Etch
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Oxford PECVD System 100
! scope="col" style="text-align:left; width: 40%" |Tool Name
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Chemical Vapor
! scope="col" style="text-align:left; width: 40%" |Resource Area
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
! scope="col" style="text-align:center; width: 20%" |Hourly Rate
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Chalcogenide Sputterer
! scope="col" style="text-align:left; background-color:#ffd8b4;" |General Lab
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
! scope="col" style="text-align:left; background-color:#ffe7d1;" |See details below
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$43/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA Dielectric Sputterer
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Raith EBPG 5000+ and 5200 Electron Beam Writers
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
! scope="col" style="text-align:left; background-color:#ffe7d1;" |Electron Beam Lithography (EBL)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$130/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| AJA E-beam Evaporator (estim. Dec arrival)
! scope="col" style="text-align:left; background-color:#ffd8b4;" |FEI Nova 600 Dualbeam Focused Ion Beam
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$75/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| CHA MK40 E-Beam Evaporator
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford Cobra III-V ALE Etch System (TBA)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
! scope="col" style="text-align:left; background-color:#ffe7d1;" |Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$60/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Lesker Labline E-Beam Evaporator
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford PECVD "2" System (TBA)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Deposition, Physical
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$60/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 600 Dualbeam Focused Ion Beam
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford FlexAl ALD/ALE System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
! scope="col" style="text-align:left; background-color:#ffe7d1;" |Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$40/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Zeiss Orion NanoFab
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford III-V Etch System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$40/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Nova 200 NanoLab Dualbeam SEM
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford Dielectric Etch System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$40/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Quanta ESEM /NPGS
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford DRIE Etch System
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$40/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Sirion FESEM
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Oxford PECVD System (legacy)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Scanning Electron (SEM)
! scope="col" style="text-align:left; background-color:#ffe7d1;" | Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$40/hr
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| FEI Tecnai TF-30 TEM, STEM, EDS & HAADF
! scope="col" style="text-align:left; background-color:#ffd8b4;" |Nanoscribe PPGT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | Microscopy, Transmission Electron (TEM)
! scope="col" style="text-align:left; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $130
! scope="col" style="text-align:center; background-color:#FFFFFF;" |$5/hr
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Nanoscribe Photonic Professional GT
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 3D Printer (TBA)
!scope="col" style="text-align:center; background-color:#ffe7d1;" | 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
|}
|}


'''General Lab Use is counted as time in the KNI cleanroom facility. It includes access to:'''  
'''Academic Discount on General Cleanroom Usage'''
- Atomic Force Microscope (AFM)
 
- Critical Point Dryer
A 50% discount will be applied to the General Cleanroom rate for any cleanroom usage accrued ''after'' 40 hours per calendar month. The discounted hourly rate, $21.50, is only applied to the hours that exceed 40 in a given month.
- Laser Interference Lithography System
 
- Mask Aligners
Example: A user logs 50 hours in the cleanroom during the month of October. Their invoice will be: (40 x $43) + (10 x $21.50) = $1,935
- Parylene Coater
 
- Profilometer
'''General Lab use is counted as time in the KNI cleanroom facility. It includes access to:'''
- Scriber Breaker
*Atomic Force Microscope
- Spectroscopic Ellipsometer
*Critical Point Dryer
- Tube Furnaces (Wet, Dry Oxide + Annealing)
*Electron Beam Evaporators
- Wafer Bonder
*Laser Interference Lithography System
- Wafer Stepper
*He-Ne-Ga Ion Microscope (Orion Nanofab)
- Wet Chemistry Room/general chemical supplies
*Mask Aligners
- Wire Bonder
*Parylene Coater
- XeF2 Silicon Etcher
*Profilometer
- TEM prep area (in Keck)
*Rapid Thermal Processor
- Other tools not listed in the table above
*Scanning Electron Microscopes (Quanta, Sirion)
*Scriber Breaker
*Spectroscopic Ellipsometer
*Tube Furnaces (Wet, Dry Oxide + Annealing)
*Wafer Stepper
*Wet Chemistry Room/general supplies
*Wire Bonder
*XeF2 Silicon Etcher
*Other tools not listed in the table above


'''Miscellaneous Rates'''
'''Miscellaneous Rates'''
*Precious Metal (gold and platinum) usage will be billed the market rate, per gram.
* Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.Staff-approved full service work is $100/hr.
*Dedicated KNI Staff Labor/Support for Research is $100/hr.
 
'''MONTHLY TIERED RATES'''
Discounts are applied on an individual user basis for hours accrued in a specific Lab Area during a given calendar month.


{| class="wikitable" style="width: 90%;"
==Full-Service Work Requests ==
KNI lab members and non-lab members can submit a request for full-service work performed by KNI technical staff using KNI equipment. The project will incur costs based on the actual usage of equipment (refer to rates above), as well as charges for the following:
{| class="wikitable"
|Fees
|Price
|-
|-
!scope="col" style="text-align:left; width: 28%"| Lab Area
|Technical Staff Effort (hourly)
!scope="col" style="text-align:center; width: 12%"| Tier A
|$                                                    100.00
!scope="col" style="text-align:center; width: 12%" | Tier A Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier B
!scope="col" style="text-align:center; width: 12%" | Tier B Hourly Rate
!scope="col" style="text-align:center; width: 12%"| Tier C
!scope="col" style="text-align:center; width: 12%" | Tier C Hourly Rate
|-
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Electron Beam Lithography (EBL)
|Administrative Fee (per transaction)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 24 hours
|$                                                    100.00
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $120
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 24-48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 48 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Etch, Reactive Ion (RIE)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $45
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $22.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Chemical Vapor
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 10 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $60
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 10-20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Deposition, Physical
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 10 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $30
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 10-20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 20 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Focused Ion Beam (FIB)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $70
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Scanning Electron (SEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 15 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $35
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 15-30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $17.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 30 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| Microscopy, Transmission Electron (TEM)
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 16 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $130
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 16-32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $65
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| 2D/3D Print
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 50 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $15
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 50-100 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $7.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 100 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|-
!scope="col" style="text-align:left; background-color:#ffd8b4;"| General Lab Use
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Up to 32 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $37.50
!scope="col" style="text-align:center; background-color:#FFFFFF;"| 32-64 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $18.75
!scope="col" style="text-align:center; background-color:#FFFFFF;"| Over 64 hours
!scope="col" style="text-align:center; background-color:#FFFFFF;"| $0
|}
|}
'''To submit a request for full-service work''', contact the technical staff member in charge of the equipment you are interested in using, or send an email to [mailto:kni@caltech.edu kni@caltech.edu]. Requests will be reviewed and selected based on staff availability, agreement of scope, and turnaround timeline. A PTA must be provided in advance in order for work to begin. KNI offers no guarantees for the end product.


'''Example:'''
'''Note:''' The rates above are the direct costs. Overhead fees will be applied.
A lab member logs 25 cumulative hours on the Lesker e-beam evaporator and the AJA dielectric sputterer in the month of October. Based on the
thresholds listed above for the "Physical Deposition" Area (which includes the Lesker and AJA tools), the costs are:
(10 hours x $30) + (10 hours x $15) + (5 hours x $0) = $450 for 25 hours.
During that same calendar month, the same user logs 40 total hours in the general KNI lab facility and 5 hours on the spectroscopic ellipsometer,
which is included in the "General Lab" Area. Those costs are:
(32 hours x $37.50) + (8 hours x $18.75) = $1,350 for 40 hours.
The lab member's total October direct costs are $1,800.


==OVERHEAD/INDIRECT COST RATE==
==Overhead/Indirect Cost Rate ==
*Non-Caltech Academic, Government, and Corporate KNI lab members will be subject to Caltech's F&A (indirect/"overhead") costs. The F&A rate for fiscal year 2023 is 70%.  
The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2026 is 70%.  
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please check with your grants manager.*
Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please discuss with your grants manager.


==External/Corporate Memberships==
==External/Corporate Memberships==


For information on the KNI corporate lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates. Additional paperwork is required, including a Facilities Use Agreement, purchase order, and an External Affiliate appointment. This process may take a few weeks before an external user is able to start in the KNI Lab.
The KNI Lab is open to external academic, government, industry, and startup organizations. Rates for industry and startups differ from the posted rates (above) for our internal academic users. All external users will be billed for Caltech's fiscal year overhead rate.
 
For information on the KNI external lab membership plan, please send an email to [mailto:tkimoto@caltech.edu tkimoto@caltech.edu] with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.  
 
'''Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment.''' This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.

Latest revision as of 06:03, 1 October 2025

Overview of KNI Lab User Fees
Rates below are valid beginning October 1, 2025 and are subject to change

  • Fees are incurred on a pay-as-you-go basis (tools are charged by the hour or portion thereof).
  • Lab users do NOT incur lab fees during days or months of non-use.
  • Invoices are issued monthly.

Note: New users must submit a New User Form and attend general KNI Lab safety training before lab access is granted.

Caltech & JPL User Rates

Below is a table of direct hourly rates for lab and equipment use in the KNI Laboratory. Hourly rates are applied to an individual's actual usage in the KNI Lab. Rates do not include any applicable indirect charges, such as F&A fees. F&A (overhead) will be applied separately based on the customer's PTA type. Rates are valid beginning October 1, 2025 and are subject to change.

Tool Name Resource Area Hourly Rate
General Lab See details below $43/hr
Raith EBPG 5000+ and 5200 Electron Beam Writers Electron Beam Lithography (EBL) $130/hr
FEI Nova 600 Dualbeam Focused Ion Beam Microscopy, Focused Ion Beam (FIB) $75/hr
Oxford Cobra III-V ALE Etch System (TBA) Deposition, Chemical Vapor $60/hr
Oxford PECVD "2" System (TBA) Microscopy, Focused Ion Beam (FIB) $60/hr
Oxford FlexAl ALD/ALE System Deposition, Chemical Vapor $40/hr
Oxford III-V Etch System Microscopy, Focused Ion Beam (FIB) $40/hr
Oxford Dielectric Etch System Microscopy, Focused Ion Beam (FIB) $40/hr
Oxford DRIE Etch System Microscopy, Focused Ion Beam (FIB) $40/hr
Oxford PECVD System (legacy) Microscopy, Focused Ion Beam (FIB) $40/hr
Nanoscribe PPGT 2D/3D Print $5/hr

Academic Discount on General Cleanroom Usage

A 50% discount will be applied to the General Cleanroom rate for any cleanroom usage accrued after 40 hours per calendar month. The discounted hourly rate, $21.50, is only applied to the hours that exceed 40 in a given month.

Example: A user logs 50 hours in the cleanroom during the month of October. Their invoice will be: (40 x $43) + (10 x $21.50) = $1,935

General Lab use is counted as time in the KNI cleanroom facility. It includes access to:

  • Atomic Force Microscope
  • Critical Point Dryer
  • Electron Beam Evaporators
  • Laser Interference Lithography System
  • He-Ne-Ga Ion Microscope (Orion Nanofab)
  • Mask Aligners
  • Parylene Coater
  • Profilometer
  • Rapid Thermal Processor
  • Scanning Electron Microscopes (Quanta, Sirion)
  • Scriber Breaker
  • Spectroscopic Ellipsometer
  • Tube Furnaces (Wet, Dry Oxide + Annealing)
  • Wafer Stepper
  • Wet Chemistry Room/general supplies
  • Wire Bonder
  • XeF2 Silicon Etcher
  • Other tools not listed in the table above

Miscellaneous Rates

  • Precious Metal (gold, platinum, etc.) usage will be billed the market rate, per gram.Staff-approved full service work is $100/hr.

Full-Service Work Requests

KNI lab members and non-lab members can submit a request for full-service work performed by KNI technical staff using KNI equipment. The project will incur costs based on the actual usage of equipment (refer to rates above), as well as charges for the following:

Fees Price
Technical Staff Effort (hourly) $                                                    100.00
Administrative Fee (per transaction) $                                                    100.00

To submit a request for full-service work, contact the technical staff member in charge of the equipment you are interested in using, or send an email to kni@caltech.edu. Requests will be reviewed and selected based on staff availability, agreement of scope, and turnaround timeline. A PTA must be provided in advance in order for work to begin. KNI offers no guarantees for the end product.

Note: The rates above are the direct costs. Overhead fees will be applied.

Overhead/Indirect Cost Rate

The KNI Lab charges for Non-Caltech Academic, Government, and Corporate KNI lab members are subject to Caltech's F&A (indirect/"overhead") rate. The F&A rate for fiscal year 2026 is 70%. Internal (Caltech and JPL) users will also have overhead applied to their charges. The overhead is accounted for in the back end of the internal charging process and the overhead rate is dependent on the PTA used to pay for the KNI Lab fees. If you have questions about this, please discuss with your grants manager.

External/Corporate Memberships

The KNI Lab is open to external academic, government, industry, and startup organizations. Rates for industry and startups differ from the posted rates (above) for our internal academic users. All external users will be billed for Caltech's fiscal year overhead rate.

For information on the KNI external lab membership plan, please send an email to tkimoto@caltech.edu with details regarding 1) the number of people looking to join as KNI lab members, 2) equipment needs, 3) anticipated start date, and 4) information about the company. Startup companies may qualify for limited-term reduced rates.

Additional paperwork is required, including a Facilities Use Agreement, certificate of liability insurance that meets Caltech requirements, a purchase order, and an External Affiliate appointment. This process can take up to a few weeks, and all steps must be completed before an external user is able to start in the KNI Lab.