Spectroscopic Ellipsometer

M-2000 Spectroscopic Ellipsometer Instrument Type Optical Characterization, Metrology Techniques Ellipsometry Staff Manager Alex Wertheim Staff Email alexw@caltech.edu Staff Phone 626-395-3371 Reserve time on FBS Request training via FBS User Dashboard Lab Location B235 Steele Lab Phone 626-395-1539 Manufacturer J.A. Woolam Company Model M-2000

Description

The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90°, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.

Applications

• Thickness measurement
• Optical & electronic property analysis
• Surface roughness measurement
• Materials identification

Resources

SOP

• KNI SOP

Video Tutorials

• Ellipsometry & CompleteEASE:
  • Part 1: Fitting basics for transparent films
  • Part 2: Transparent polymers
  • Part 3: Absorbing Films via B-Spline
  • Part 4: Modeling Absorption with Oscillators
  • Part 5: Thickness Measurement of Metals

Specifications

Hardware Specifications

• CompleteEASE measurement and analysis software
• Spectral Range: 370-1000 nm
• Motorized stage enables automated mapping scans across up to 100 mm wafers
• Automatic measurement angle control
• Automatic sample alignment
• 2 mm spot size
  • Removable beam focusing probes can reduce spot size to 300 μm