Nova 200 NanoLab: SEM & EDS

Nova 200 NanoLab Instrument Type Microscopy Techniques SEM, EDS, WDS, Immersion Lens Imaging Staff Manager Matthew S. Hunt, PhD Staff Email matthew.hunt@caltech.edu Staff Phone 626-395-5994 Reserve time on FBS Request training via FBS User Dashboard Lab Location B203 Steele Lab Phone 626-395-1542 Manufacturer FEI (now Thermo Fisher) Model {{{Model}}}

Description

The Nova 200 is the KNI's highest-resolution analytical scanning electron microscope (SEM), equipped with an immersion-lens for imaging sub-10 nm features and both energy dispersive spectroscopy (EDS) and wavelength dispersive spectroscopy (WDS) detectors for compositional analysis. It is also outfitted with a gallium focused ion beam (Ga-FIB) column, which is currently not operational because the Nova 600 NanoLab and ORION NanoFab together meet the KNI's Ga-FIB demand; gallium could be reactivated on the Nova 200 the future. See a full list of training and educational resources for this instrument below.

SEM Applications

• Ultra-High-Resolution Imaging (Immersion Mode aka UHR Mode)
• High-Resolution Imaging (Field-Free Mode aka Normal Mode)
• Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
• Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)
• Tungsten deposition via Gas Injection System (GIS)
• Automated imaging with RunScript program & AutoScript language

EDS & WDS Applications

• Spectrum acquisition for quantitative compositional analysis
• Linescan acquisition for 1D spatial compositional analysis
• Map acquisition for 2D spatial compositional analysis

Resources

SOPs & Troubleshooting

• SEM SOPs (Short Version | Long Version)
• EDS SOPs (Short Version | Long Version)
• Troubleshooting Guide

Video Tutorials

• Getting Started | Basic SEM Alignment
• Astigmatism Correction (Details | On Right-Angle Features | Stigmator Alignment)
• Eucentric Height: What it means, When to use it & How to get there
• Adjusting TLD Voltage to Capture SE vs. BSE Signal

Graphical Handouts

• SEM & EDS/WDS Concepts
• SEM Alignments
• Guide to Optimizing SEM Imaging

Presentations

• Scanning Electron Microscopy: Principles, Techniques & Applications (includes sides on EDS & WDS)

Manufacturer Manuals

• Nova NanoLab Operation Manual
• Gas Injection Systems – Deposition of Tungsten (Technical Note)
• Gas Injection Systems – Delineation Etch for SiO₂ (Technical Note)
• Gas Injection Systems – Selective Carbon Etching (Technical Note)
• Gas Injection Systems – Beam Chemistries Presentation
• Scripting – AutoScript Language Manual (year 2000 Technical Note: most complete)
• Scripting – AutoScript Language Manual (year 2005 Technical Note: less complete, still useful)
• Scripting – RunScript Manual

Simulation Software

• CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions (very useful for EDS & WDS)
• The Stopping & Range of Ions in Matter (SRIM) – simulate i-beam/specimen interactions

Order Your Own Stubs

• Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each SEM, yet you should buy your own so that you can keep them clean and available to you. There are many stub geometries and configurations, some of which will be right for you to purchase and keep with your other cleanroom items.
  • Buy stubs with copper clips (recommended for most devices, especially those with non-conductive substrates)
  • Buy stubs without copper clips (OK for devices with conductive substrates)

Specifications

Manufacturer Specifications

• Nova 200 NanoLab Data Sheet (not all parameters apply to our instrument, see below for details specific to the KNI's Nova 200)

SEM Specifications

• 0.5 to 30.0 kV
• Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
• etc.

EDS & WDS Specifications

• 0.5 to 30.0 kV
• Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
• etc.