Sirion: SEM & EDS

Sirion SEM [[image:|320px|center|]] Instrument Type Microscopy Techniques SEM, EDS Immersion Lens Imaging Staff Manager Matthew S. Hunt, PhD Staff Email matthew.hunt@caltech.edu Staff Phone 626-395-5994 Reserve time on FBS Request training via FBS User Dashboard Lab Location B209 Steele Lab Phone 626-395-1541 Manufacturer FEI (now Thermo Fisher) Model {{{Model}}} [[image:|320px|center|]]

Description

The Sirion is a field emission gun (FEG) scanning electron microscope (SEM) equipped with an immersion-lens for imaging sub-10 nm features and an energy dispersive spectroscopy (EDS) detector for compositional analysis. While it is the KNI's oldest SEM, it is also a very steady instrument, offering a lower-cost alternative to similar high-resolution imaging that is available on the newer Nova 600 & Nova 200 NanoLab platforms. The smaller Sirion chamber also allows for fast pump and vent times, which makes this SEM very useful for quick inspection. See a full list of training and educational resources for this instrument below.

SEM Applications

• Ultra-High-Resolution Imaging (Immersion Mode aka UHR Mode)
• High-Resolution Imaging (Field-Free Mode aka Normal Mode)
• Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
• Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)

EDS Applications

• Spectrum acquisition for quantitative compositional analysis
• Linescan acquisition for 1D spatial compositional analysis
• Map acquisition for 2D spatial compositional analysis

Resources

SOPs & Troubleshooting

• SEM SOPs (Short Version | Long Version)
• EDS SOPs (Short Version | Long Version)
• Troubleshooting Guide

Video Tutorials

• Getting Started | Basic SEM Alignment
• Astigmatism Correction (Details | On Right-Angle Features | Stigmator Alignment)
• Eucentric Height: What it means, When to use it & How to get there
• Adjusting TLD Voltage to Capture SE vs. BSE Signal

Graphical Handouts

• SEM & EDS Concepts
• SEM Alignments
• Guide to Optimizing SEM Imaging

Presentations

• Scanning Electron Microscopy: Principles, Techniques & Applications (includes slides on EDS)

Manufacturer Manuals

• Sirion SEM Operation Manual

Simulation Software

• CASINO Electron Beam Simulation Software – simulate e-beam/specimen interactions (very useful for EDS)

Order Your Own Stubs

• Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each SEM, yet you should buy your own so that you can keep them clean and available to you. There are many stub geometries and configurations, some of which will be right for you to purchase and keep with your other cleanroom items.
  • Buy stubs with copper clips (recommended for most devices, especially those with non-conductive substrates)
  • Buy stubs without copper clips (OK for devices with conductive substrates)

Specifications

Manufacturer Specifications

• Sirion SEM Product Guide & Data Sheet

SEM Specifications

• 0.5 to 30.0 kV
• Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
• etc.

EDS & WDS Specifications

• 0.5 to 30.0 kV
• Apertures: 10 mm, 15 mm, 20 mmm, 30 mm
• etc.