Wet Chemistry Resources: Difference between revisions
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===RCA-1=== | ===RCA-1=== | ||
Recipe steps or links | |||
===Piranha Etch=== | ===Piranha Etch=== | ||
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*[https://cleanroom.byu.edu/chemical_etching.html BYU Etching Guidance] | *[https://cleanroom.byu.edu/chemical_etching.html BYU Etching Guidance] | ||
*[https://www.nanotech.ucsb.edu/wiki/index.php/Wet_Etching_Recipes UCSB Wet Etching Recipes] | |||
==Commercial Materials== | ==Commercial Materials== | ||
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=Safety Resources= | =Safety Resources= | ||
Do we have materials to link to? | |||
https://cleanroom.byu.edu/acid_safety | https://cleanroom.byu.edu/acid_safety | ||
Revision as of 09:55, 31 October 2019
cleaning procedures links, breakout
Sample Cleaning Resources
https://cleanroom.byu.edu/clean
Solvent Cleans
- Acetone, IPA
- Solvent for organics, IPA cleans remaining residues due to acetone's high evaporation rate
- Acetone, Methanol
- Similar to above except Methanol is more toxic, and a polar chemical versus IPA which is non-polar
- Acetone, Methanol, IPA
- Acetone, Methanol, IPA, DI Water
- Remover PG (50°C), IPA
- Dichloromethane, IPA
- Caution, high evaporation rate may leave residue and beakers get quickly condense water/ice
- Nanostrip?
Etching Cleans
RCA-1
Recipe steps or links
Piranha Etch
HF Dip
Plasma Cleans
Wet Etching Resources
find etch list book and other links
Research Papers and Books
External Laboratories
also find alternative:
Commercial Materials
KNI Wet Etch Recipes Table
Table of Wet Etch recipes from KNI Papers
And general table from you, not from papers, maybe from recipes?
| Material | Etchant | Rate (nm/min) | Anisotropy | Selective to | Selectivity | Origin and Notes |
|---|---|---|---|---|---|---|
| KNI CHA Al | Al Etch Type D | ~1000 | Highly | Al | High | Transene |
| KNI PECVD SiO2 | HF | ~1000 | Highly | SiO2 | High | measured 10/19 |
| KNI PECVD SiN3 | Ex | ~1000 | Highly | SiN3 | High | measured 10/19 |
| KNI PECVD a-Si | KOH | ~1000 | Highly | Si | High | measured 10/19 |
Other Procedures
Liftoff
Electroplating
Safety Resources
Do we have materials to link to?
https://cleanroom.byu.edu/acid_safety