Tube Furnaces for Wet & Dry Processing

Tystar Tytan Tube Furnaces 1 & 2 [[image:|320x373px|center|]] Instrument Type Support Tools Techniques Oxidation/Annealing Staff Manager Nathan S. Lee Staff Email nathslee@caltech.edu Staff Phone 626-395-1319 Reserve time on FBS Request training via FBS User Dashboard Lab Location Lab Phone 626-395-1532 Manufacturer Tystar Corporation Model Tystar Tytan Horizontal Diffusion Furnace

Description

The system is designed for processing up to 100 ea. 150 mm (6") wafers per tube. Tube 1 is designated for Wet/Dry oxidation using Flask Evaporator. Tube 2 is designated for Dry oxidation/Anneal.

Applications

• Dry/Wet oxidation
• Annealing

Resources

SOPs & Troubleshooting

• KNI SOP