Scriber-Breaker: Difference between revisions

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(Created page with "{{InstrumentInfoboxOneImage| |InstrumentName = Scriber-Breaker |HeaderColor = #FFFFFF |ImageOne = Dynatex-GST-150_Scriber-Breaker.jpg |ImageTwo = |InstrumentType = Equipmen...")
 
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|Model = GST-150  
|Model = GST-150  
|Techniques = Wafer & Chip Scribing,<br>Scribe Breaking
|Techniques = Wafer & Chip Scribing,<br>Scribe Breaking
|EmailList = kni-photolith
|EmailList = kni-scriber
|EmailListName =  Photolithography
|EmailListName =  Scriber
}}
}}
== Description ==
== Description ==
The scriber-breaker uses a dry scribing and breaking technique to allow cleaner separation of dies on a wafer than can be done with a wet cutting saw. Some advantages are that the elimination of deionized water protects delicate structures on the wafer surface, decreasing street sizes of existing wafers, and dicing difficult-to-manage substrates. Many compound semiconductors can be challenging when dicing, and the dry scribe/break technology is successful for such materials.
The scriber-breaker uses a dry scribing and breaking technique to allow cleaner separation of dies on a wafer than can be done with a wet cutting saw. Some advantages are that the elimination of deionized water protects delicate structures on the wafer surface, decreasing street sizes of existing wafers, and dicing difficult-to-manage substrates. Many compound semiconductors can be challenging when dicing, and the dry scribe/break technology is successful for such materials.
===== Type1 Applications =====
===== Applications =====
* Application1
* Scribing and/or breaking wafers
* Application2
* Application3


== Resources ==
== Resources ==
===== SOPs & Troubleshooting =====
===== SOPs & Troubleshooting =====
* [https://caltech.box.com/s/BROKEN SOP]
* [https://caltech.box.com/s/BROKEN General SOP & Troubleshooting (COMING SOON)]
* [https://caltech.box.com/s/BROKEN Troubleshooting Guide]
 
===== Manufacturer Manuals =====
===== Manufacturer Manuals =====
* [https://caltech.box.com/s/BROKEN Manual]
* [https://caltech.box.com/s/BROKEN Manual (COMING SOON)]


== Specifications ==
== Specifications ==
===== Manufacturer Specifications =====
* [https://caltech.box.com/s/BROKEN Manufacturer Data Sheet]
===== Notable Specifications =====
===== Notable Specifications =====
* Voltage Range: 0.5 to 30.0 kV
* Accommodated Sizes: up to 6" wafers
* Aperture Sizes: 10 mm, 15 mm, 20 mmm, 30 mm
* Materials excluded from scribing: COMING SOON
* etc.

Revision as of 21:12, 22 May 2019

Scriber-Breaker
Dynatex-GST-150 Scriber-Breaker.jpg
Instrument Type Substrate Processing
Techniques Wafer & Chip Scribing,
Scribe Breaking
Staff Manager Bert Mendoza
Staff Email bertm@caltech.edu
Staff Phone 626-395-4075
Reserve time on FBS
Request training via FBS User Dashboard
Lab Location B213 Steele
Lab Phone 626-395-1537
Manufacturer Dynatex
Model GST-150

Description

The scriber-breaker uses a dry scribing and breaking technique to allow cleaner separation of dies on a wafer than can be done with a wet cutting saw. Some advantages are that the elimination of deionized water protects delicate structures on the wafer surface, decreasing street sizes of existing wafers, and dicing difficult-to-manage substrates. Many compound semiconductors can be challenging when dicing, and the dry scribe/break technology is successful for such materials.

Applications
  • Scribing and/or breaking wafers

Resources

SOPs & Troubleshooting
Manufacturer Manuals

Specifications

Notable Specifications
  • Accommodated Sizes: up to 6" wafers
  • Materials excluded from scribing: COMING SOON