Spectroscopic Ellipsometer: Difference between revisions
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== Description == | == Description == | ||
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' | The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants ''n'' and ''k'' (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability. | ||
===== Applications ===== | ===== Applications ===== | ||
Revision as of 00:48, 22 May 2019
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Description
The J.A. Woolam M-2000 spectroscopic ellipsometer is a tool for optical thin film analysis that enables determination of thickness, optical constants n and k (refractive index and absorption coefficient), and allows modeling of electronic characteristics such as majority carrier concentration and band-gap. The beam incidence angle ranges from 45-90 degrees, allowing both standard ellipsometry and transmission measurements. It is equipped with a motorized sample stage that enables wafer-scale measurements. The CompleteEASE control and analysis software possesses detailed measurement and modeling capability.
Applications
- Thickness measurement
- Optical/electronic property analysis
- Surface roughness measurement
- Materials identification
Resources
SOP
Video Tutorials
- Ellipsometry & CompleteEASE:
Manufacturer Manuals
Specifications
Hardware Specifications
- CompleteEASE measurement and analysis software
- Spectral range: 370-1000nm
- Motorized stage enables automated mapping scans across up to 100mm wafers
- Automatic measurement angle control
- Automatic sample alignment
- 2mm spot size
- Removable beam focusing probes reduce spot size to 300um