DRIE: Bosch & Cryo ICP-RIE for Silicon: Revision history

15 April 2024

• curprev 23:0023:00, 15 April 2024‎ Sydney talk contribs‎ m 6,005 bytes −148‎ Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

22 August 2023

• curprev 21:1521:15, 22 August 2023‎ Kmmckenz talk contribs‎ 6,153 bytes −192‎ →‎SOPs & Troubleshooting: removed old and duplicate links
• curprev 21:0621:06, 22 August 2023‎ Kmmckenz talk contribs‎ 6,345 bytes +98‎ →‎SOPs & Troubleshooting: added reservation policy

24 April 2023

• curprev 23:1123:11, 24 April 2023‎ Kmmckenz talk contribs‎ 6,247 bytes −16‎ →‎Allowed material in DRIE: removed SiO2 from allowed etch materials

30 June 2022

• curprev 05:3005:30, 30 June 2022‎ Derose talk contribs‎ 6,263 bytes +18‎ →‎Equipment Data

27 May 2022

• curprev 00:4100:41, 27 May 2022‎ Bertm talk contribs‎ 6,245 bytes +192‎ →‎SOPs & Troubleshooting

21 December 2021

• curprev 00:4700:47, 21 December 2021‎ Kmmckenz talk contribs‎ 6,053 bytes +558‎ added Related Tools section

21 September 2021

• curprev 23:2823:28, 21 September 2021‎ Kmmckenz talk contribs‎ m 5,495 bytes 0‎ update primary staff phone
• curprev 23:2623:26, 21 September 2021‎ Kmmckenz talk contribs‎ m 5,495 bytes 0‎ capitalization of McKenzie
• curprev 22:4222:42, 21 September 2021‎ Derose talk contribs‎ 5,495 bytes +1‎ No edit summary

2 August 2020

• curprev 04:5804:58, 2 August 2020‎ Derose talk contribs‎ 5,494 bytes +130‎ →‎Resources

8 November 2019

• curprev 01:0001:00, 8 November 2019‎ Matthew talk contribs‎ m 5,364 bytes +123‎ →‎Process Documents

29 May 2019

• curprev 19:4019:40, 29 May 2019‎ Nathslee talk contribs‎ 5,241 bytes 0‎ →‎SOPs & Troubleshooting
• curprev 16:3516:35, 29 May 2019‎ Derose talk contribs‎ m 5,241 bytes −1‎ →‎Resources
• curprev 16:3416:34, 29 May 2019‎ Derose talk contribs‎ 5,242 bytes +783‎ →‎Resources

28 May 2019

• curprev 22:1522:15, 28 May 2019‎ Nathslee talk contribs‎ 4,459 bytes −111‎ →‎Description
• curprev 22:0322:03, 28 May 2019‎ Nathslee talk contribs‎ 4,570 bytes 0‎ →‎Description
• curprev 19:5019:50, 28 May 2019‎ Derose talk contribs‎ 4,570 bytes +44‎ →‎Manufacturer Manuals
• curprev 17:2717:27, 28 May 2019‎ Derose talk contribs‎ 4,526 bytes −92‎ →‎SOPs & Troubleshooting
• curprev 15:5315:53, 28 May 2019‎ Matthew talk contribs‎ 4,618 bytes +1‎ No edit summary

27 May 2019

• curprev 20:4620:46, 27 May 2019‎ Matthew talk contribs‎ m 4,617 bytes +29‎ No edit summary
• curprev 20:4420:44, 27 May 2019‎ Matthew talk contribs‎ m 4,588 bytes +1‎ →‎System Specifications
• curprev 20:4420:44, 27 May 2019‎ Matthew talk contribs‎ 4,587 bytes −37‎ No edit summary

23 May 2019

• curprev 18:0618:06, 23 May 2019‎ Matthew talk contribs‎ 4,624 bytes −85‎ →‎SOPs & Troubleshooting
• curprev 18:0518:05, 23 May 2019‎ Matthew talk contribs‎ 4,709 bytes −86‎ →‎SOPs & Troubleshooting

22 May 2019

• curprev 22:1422:14, 22 May 2019‎ Derose talk contribs‎ m 4,795 bytes +30‎ No edit summary
• curprev 21:5121:51, 22 May 2019‎ Derose talk contribs‎ m 4,765 bytes +168‎ →‎Process Documents
• curprev 21:4321:43, 22 May 2019‎ Derose talk contribs‎ 4,597 bytes +78‎ →‎Process Documents
• curprev 21:1121:11, 22 May 2019‎ Derose talk contribs‎ 4,519 bytes +1,132‎ →‎Specifications
• curprev 21:0321:03, 22 May 2019‎ Derose talk contribs‎ 3,387 bytes −291‎ →‎Resources
• curprev 00:3700:37, 22 May 2019‎ Matthew talk contribs‎ 3,678 bytes +3,678‎ Created page with "{{InstrumentInfobox| |InstrumentName = DRIE |HeaderColor = #FFE2B9 |ImageOne = Silicon-Microcones_Paul-A-Kempler.jpg |ImageTwo = DRIE_Bosch-and-Cryo_ICP–RIE.jpg |InstrumentT..."