Sirion: SEM & EDS - Revision history

Ykim3: /* SOPs & Troubleshooting */

2026-09-14T20:20:51Z

SOPs & Troubleshooting

← Older revision		Revision as of 20:20, 14 September 2026
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	* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]		* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]
	* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]		* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]
	* [https://caltech~~.app~~.box.com/~~file~~/~~2466561198434~~ GenISys InSPEC SOP]		* [https://caltech.box.com/s/zg1ifp20khk6uv79jh3bukm46xh5gong GenISys InSPEC SOP]
	* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]		* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]

Ykim3: /* SOPs & Troubleshooting */

2026-09-14T20:19:36Z

SOPs & Troubleshooting

← Older revision		Revision as of 20:19, 14 September 2026
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	* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]		* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]
	* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]		* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]
	* [https://caltech.app.box.com/file/~~2466367335946~~ GenISys InSPEC SOP]		* [https://caltech.app.box.com/file/2466561198434 GenISys InSPEC SOP]
	* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]		* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]

Ykim3: /* SOPs & Troubleshooting */

2026-09-14T20:16:19Z

SOPs & Troubleshooting

← Older revision		Revision as of 20:16, 14 September 2026
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	* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]		* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]
	* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]		* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]
			* [https://caltech.app.box.com/file/2466367335946 GenISys InSPEC SOP]
	* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]		* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]

Ykim3: /* SOPs & Troubleshooting */

2026-09-14T20:10:39Z

SOPs & Troubleshooting

← Older revision		Revision as of 20:10, 14 September 2026
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	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]		* [https://caltech.box.com/s/rpbtox8l31qi3kw3b014e3e8i4ctjpdy KNI Microscopy Policies]
	* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd SOP & Manuals & SDS]		* [https://caltech.box.com/s/xuympwz92lbi2cps7l5mskq9sky9intd Sirion SEM SOP & Manuals & SDS]
	* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]		* [https://caltech.box.com/s/p9pgau696uipjrb2vdkhixynmc3es322 FEI Sirion Series SEM Manufacturer Operations Manual]

Ykim3: /* Description */

2026-09-14T20:08:21Z

Description

← Older revision		Revision as of 20:08, 14 September 2026
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	}}		}}
	== Description ==		== Description ==
	The Sirion is a field emission gun (FEG) scanning electron microscope (SEM) equipped with an immersion lens for imaging sub-10 nm features (so-called "ultra high resolution mode," UHR). While it is the KNI's oldest SEM, it is also a very steady instrument, offering a lower-cost alternative to similar high-resolution imaging that is available on the newer [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]] platform. The smaller Sirion chamber also allows for fast pump and vent times, which makes this SEM very useful for quick inspection. See a full list of training and educational resources for this instrument below.		The Sirion is a field emission gun (FEG) scanning electron microscope (SEM) equipped with an immersion lens for imaging sub-10 nm features (so-called "ultra high resolution mode," UHR). While it is the KNI's oldest SEM, it is also a very steady instrument, offering a lower-cost alternative to similar high-resolution imaging that is available on the newer [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe \| Nova 600]] platform. The smaller Sirion chamber also allows for fast pump and vent times, which makes this SEM very useful for quick inspection. The Sirion is equipped with the GenISys InSPEC upgrade kit and software, which converts a standard SEM into an integrated, high-precision metrology and inspection tool. See a full list of training and educational resources for this instrument below.

	===== SEM Applications =====		===== SEM Applications =====
	* Ultra-High-Resolution Imaging (Immersion Mode aka UHR Mode)		* Ultra-High-Resolution Imaging (Immersion Mode aka UHR Mode)

Ykim3: /* SEM Applications */

2026-09-14T20:05:36Z

SEM Applications

← Older revision		Revision as of 20:05, 14 September 2026
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	* Secondary Electron (SE) & Backscattered Electron (BSE) Imaging		* Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
	* Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)		* Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)
			* GenISys InSPEC for high-precision metrology and inspection

	== Resources ==		== Resources ==

Ykim3 at 20:02, 14 September 2026

2026-09-14T20:02:35Z

← Older revision		Revision as of 20:02, 14 September 2026
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	* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.		* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.

	*[https://www.tedpella.com/~~sem_html~~/SEMpinmount.~~htm Buy stubs without copper clips]~~		*[https://www.tedpella.com/SEM_html/SEMpinmount.aspx Buy stubs without copper clips]
	** [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips]

	===== Guide to Choosing KNI SEMs & FIBs =====		===== Guide to Choosing KNI SEMs & FIBs =====
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	* ETD Grid Bias Range: -150 to 300 V		* ETD Grid Bias Range: -150 to 300 V
	* TLD Bias Range: -100 to 150 V		* TLD Bias Range: -100 to 150 V
	* Ultimate Vacuum: 3e-6 mbar		* Ultimate Vacuum: 3e-6 mbar<br>
	~~<br>~~
	<br>

Ykim3 at 20:01, 14 September 2026

2026-09-14T20:01:14Z

← Older revision		Revision as of 20:01, 14 September 2026
Line 63:		Line 63:
	* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.		* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some stubs at each Microscope which can be used by any KNI microscopy user. You can also buy your own stubs so that you can keep them clean and available to you. There are many stub geometries and configurations. If you chose to buy your own stubs, please show them to the staff microscopist prior to using them: some stubs including stubs with copper clips have large height differences and can only be used safely in specific operating conditions.

			*[https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips]
	** [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips]		** [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips]

Ykim3: /* Simulation Software */

2026-04-14T03:10:16Z

Simulation Software

← Older revision		Revision as of 03:10, 14 April 2026
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	* The KNI has a NIST-traceable standard against which SEM measurements can be compared. See Slides 54-55 of the [https://caltech.box.com/s/lulkj0pwm053akyya1shazg8wzgudq9f SEM Presentation] for details. Ask staff for help finding and using the standard in the lab.		* The KNI has a NIST-traceable standard against which SEM measurements can be compared. See Slides 54-55 of the [https://caltech.box.com/s/lulkj0pwm053akyya1shazg8wzgudq9f SEM Presentation] for details. Ask staff for help finding and using the standard in the lab.
	===== Simulation Software =====		===== Simulation Software =====
	* [http://www.gel.usherbrooke.ca/casino/What.html CASINO Electron Beam Simulation Software] – simulate e-beam/specimen interactions ~~(very useful for EDS)~~		* [http://www.gel.usherbrooke.ca/casino/What.html CASINO Electron Beam Simulation Software] – simulate e-beam/specimen interactions
	===== Sample Preparation =====		===== Sample Preparation =====
	* Use the [[Carbon Evaporator]] to make non-conductive samples conductive by applying 2-10 nm of evaporated carbon.		* Use the [[Carbon Evaporator]] to make non-conductive samples conductive by applying 2-10 nm of evaporated carbon.

Ykim3 at 17:51, 1 April 2026

2026-04-01T17:51:57Z

← Older revision		Revision as of 17:51, 1 April 2026
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	\|Manufacturer = FEI (now Thermo Fisher)		\|Manufacturer = FEI (now Thermo Fisher)
	\|Model = Sirion (aka XL-30)		\|Model = Sirion (aka XL-30)
	\|Techniques = SEM~~, EDS~~,<br>Immersion Lens Imaging		\|Techniques = SEM,<br>Immersion Lens Imaging
	\|RequestTraining = alireza@caltech.edu		\|RequestTraining = alireza@caltech.edu
	\|EmailList = kni-sem-fib		\|EmailList = kni-sem-fib