EBPG 5200: 100 kV Electron Beam Lithography - Revision history

Derose: /* Sample Prep and Writing SOPs */

2026-08-07T16:18:21Z

Sample Prep and Writing SOPs

← Older revision		Revision as of 16:18, 7 August 2026
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	* [https://caltech.box.com/s/weqpi9oam0hbvxefqp8md1q4z8q14hze EBPG 5200 Secondary Electron Detector SOP]		* [https://caltech.box.com/s/weqpi9oam0hbvxefqp8md1q4z8q14hze EBPG 5200 Secondary Electron Detector SOP]
	* [https://caltech.box.com/s/k2sicwqfbin5ktns5m30ir8wtdjqhea0 EBPG Holderfix SOP]		* [https://caltech.box.com/s/k2sicwqfbin5ktns5m30ir8wtdjqhea0 EBPG Holderfix SOP]
	* [https://labrunr.caltech.edu/Equipment_2.aspx EBPG Remote Access SOP] (log into ''LabRunr'' and download SOP from EBPG 5200 page)

	===== Advanced Troubleshooting SOPs =====		===== Advanced Troubleshooting SOPs =====

Derose: /* General SOPs */

2026-08-07T16:11:29Z

General SOPs

← Older revision		Revision as of 16:11, 7 August 2026
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	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]
	* [https://caltech.box.com/s/9whswv26y0w6yua8073nw080r3lcfdz4 EBPG Troubleshooting Guide]		* [https://caltech.box.com/s/9whswv26y0w6yua8073nw080r3lcfdz4 EBPG Troubleshooting Guide]
	* [https://caltech.box.com/s/cf5ix7iraea7m3jepjwylf4nd51d8hrg Remote EBPG access via HP Remote Graphics Server (Caltech-Only)]

	===== Training Materials =====		===== Training Materials =====

Derose: /* General SOPs */

2026-06-02T14:41:36Z

General SOPs

← Older revision		Revision as of 14:41, 2 June 2026
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	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech~~.app~~.box.com/~~file~~/~~1697395588371~~ EBPG reservation and use policy (Updated ~~April 2024~~)]		* [https://caltech.box.com/s/4lwz41kf9n7qpqxogsa7zl1kx55ldvj0 EBPG reservation and use policy (Updated June 2026)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* General SOPs */

2025-08-08T20:29:08Z

General SOPs

← Older revision		Revision as of 20:29, 8 August 2025
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	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/~~c217cz3i7crvafhlsssh6lauirixgji5~~ EBPG reservation and use policy (Updated April 2024)]		* [https://caltech.app.box.com/file/1697395588371 EBPG reservation and use policy (Updated April 2024)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* General SOPs */

2024-11-11T22:05:15Z

General SOPs

← Older revision		Revision as of 22:05, 11 November 2024
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	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/~~c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v~~ EBPG reservation and use policy (Updated ~~1 October 2022~~)]		* [https://caltech.box.com/s/c217cz3i7crvafhlsssh6lauirixgji5 EBPG reservation and use policy (Updated April 2024)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* Sample Prep and Writing SOPs */

2024-05-21T21:48:16Z

Sample Prep and Writing SOPs

← Older revision		Revision as of 21:48, 21 May 2024
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	===== Sample Prep and Writing SOPs =====		===== Sample Prep and Writing SOPs =====
			* [https://caltech.box.com/s/05w5x6u01gzpdn1ksa9r7967m2fdidai EBPG Handling Large Pattern Files SOP]
	* [https://caltech.box.com/s/ys4qbxnsqfqbrdo4dm7t48z1z9dljuwi EBPG High Resolution Mode SOP]		* [https://caltech.box.com/s/ys4qbxnsqfqbrdo4dm7t48z1z9dljuwi EBPG High Resolution Mode SOP]
	* [https://caltech.box.com/s/vpkguvtrdw9eup3rytljb5re9rfbe1fb EBPG 5200 Piece part prep SOP]		* [https://caltech.box.com/s/vpkguvtrdw9eup3rytljb5re9rfbe1fb EBPG 5200 Piece part prep SOP]

Sydney: Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T23:00:53Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:00, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Chalc_Sputter from the dropdown menu)

	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v EBPG reservation and use policy (Updated 1 October 2022)]		* [https://caltech.box.com/s/c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v EBPG reservation and use policy (Updated 1 October 2022)]

Derose: /* Description */

2023-09-21T16:27:33Z

Description

← Older revision		Revision as of 16:27, 21 September 2023
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	}}		}}
	== Description ==		== Description ==
	The Raith EBPG 5200 is a dedicated direct-write Electron Beam Pattern Generator that is used to pattern large areas by high-resolution electron beam lithography. This instrument has substrate holders to handle 3" wafers, piece parts from a couple of mm to 3" diameter and up to 6.35 mm thick, and 6" mask plates. This instrument can be outfitted with substrate holders to handle up to 200 mm wafers. While this instrument can be set to operate at 20, 50, or 100 keV, it is normally set for 100 keV operation (i.e. with an accelerating voltage of 100 kV, the average energy per electron is 100 keV).		The Raith EBPG 5200 is a dedicated direct-write Electron Beam Pattern Generator that is used to pattern large areas by high-resolution electron beam lithography. This instrument has substrate holders to handle 3" wafers, piece parts from a couple of mm to 3" diameter and up to 6.35 mm thick, and 6" mask plates. This instrument can be outfitted with substrate holders to handle up to 200 mm wafers. While this instrument can be set to operate at 20, 50, or 100 keV, it is normally set for 100 keV operation (i.e. with an accelerating voltage of 100 kV, the average energy per electron is 100 keV). <p>
			It is important that users have the time needed to prepare their data and job files without the pressure of being on the clock. This approach gives them a better chance of not having to repeat charged exposures through so much trial and error. Please note that we do not charge for the time required to prepare pattern files (in Layout Beamer and Tracer), or for preparing exposure job files (cjob). Users will receive instructions for secure remote access during training.
	===== Operational Applications =====		===== Operational Applications =====
	* Non-aligned electron beam lithography		* Non-aligned electron beam lithography

Derose: /* Data Preparation Resources */

2023-08-31T20:59:08Z

Data Preparation Resources

← Older revision		Revision as of 20:59, 31 August 2023
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	* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]		* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]
	* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]		* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]
	* [https://caltech.box.com/s/g3haulnez2ls6r2ezklcjei7jl8nx03b App Note: Multipass (Caltech-only access)]		* [https://caltech.box.com/s/g3haulnez2ls6r2ezklcjei7jl8nx03b App Note: Multipass Exposure (Caltech-only access)]
	* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]		* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]
	* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]		* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]

Derose: /* Data Preparation Resources */

2023-08-31T20:58:03Z

Data Preparation Resources

← Older revision		Revision as of 20:58, 31 August 2023
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	* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]		* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]
	* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]		* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]
	* [https://caltech.box.com/s/~~wnx3fid41baefile9epmm797tbf81z59~~ App Note: Multipass (Caltech-only access)]		* [https://caltech.box.com/s/g3haulnez2ls6r2ezklcjei7jl8nx03b App Note: Multipass (Caltech-only access)]
	* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]		* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]
	* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]		* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]