EBPG 5000+: 100 kV Electron Beam Lithography - Revision history

Derose: /* Sample Prep and Writing SOPs */

2026-08-07T18:33:24Z

Sample Prep and Writing SOPs

← Older revision		Revision as of 18:33, 7 August 2026
Line 61:		Line 61:
	* [https://caltech.box.com/s/6mqfko3fswi0rwrt8zfaj8nwjfr9v2c7 EBPG Disable marker height check SOP]		* [https://caltech.box.com/s/6mqfko3fswi0rwrt8zfaj8nwjfr9v2c7 EBPG Disable marker height check SOP]
	* [https://caltech.box.com/s/k2sicwqfbin5ktns5m30ir8wtdjqhea0 EBPG Holderfix SOP]		* [https://caltech.box.com/s/k2sicwqfbin5ktns5m30ir8wtdjqhea0 EBPG Holderfix SOP]
	* [https://labrunr.caltech.edu/Equipment_2.aspx EBPG Remote Access SOP] (log into ''LabRunr'' and download SOP from EBPG 5000+ page)

	===== Advanced Troubleshooting SOPs =====		===== Advanced Troubleshooting SOPs =====

Derose: /* General SOPs */

2026-06-02T14:42:35Z

General SOPs

← Older revision		Revision as of 14:42, 2 June 2026
Line 30:		Line 30:
	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech~~.app~~.box.com/~~file~~/~~1697395588371~~ EBPG reservation and use policy (Updated ~~April 2024~~)]		* [https://caltech.box.com/s/4lwz41kf9n7qpqxogsa7zl1kx55ldvj0 EBPG reservation and use policy (Updated June 2026)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* General SOPs */

2025-08-08T20:30:02Z

General SOPs

← Older revision		Revision as of 20:30, 8 August 2025
Line 30:		Line 30:
	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/~~c217cz3i7crvafhlsssh6lauirixgji5~~ EBPG reservation and use policy (Updated April 2024)]		* [https://caltech.app.box.com/file/1697395588371 EBPG reservation and use policy (Updated April 2024)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* General SOPs */

2024-11-11T22:06:04Z

General SOPs

← Older revision		Revision as of 22:06, 11 November 2024
Line 30:		Line 30:
	== Resources ==		== Resources ==
	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/~~c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v~~ EBPG reservation and use policy (Updated ~~1 October 2022~~)]		* [https://caltech.box.com/s/c217cz3i7crvafhlsssh6lauirixgji5 EBPG reservation and use policy (Updated April 2024)]
	* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]		* [https://caltech.box.com/s/qzhf1h1su3a1vadl6p76mg6tav49uisn EBPG SOP]
	* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]		* [https://caltech.box.com/s/jq0s85sdsd069cv9aesdfixy5fueihyh User's Guide to the EBPG pg computer desktop]

Derose: /* Sample Prep and Writing SOPs */

2024-05-21T21:49:35Z

Sample Prep and Writing SOPs

← Older revision		Revision as of 21:49, 21 May 2024
Line 47:		Line 47:

	===== Sample Prep and Writing SOPs =====		===== Sample Prep and Writing SOPs =====
			* [https://caltech.box.com/s/05w5x6u01gzpdn1ksa9r7967m2fdidai EBPG Handling Large Pattern Files SOP]
	* [https://caltech.box.com/s/xvj8jjzjyocr8kht8xfl7e6qb024t5a6 EBPG Preparing pieces for exposure on 5000+ SOP]		* [https://caltech.box.com/s/xvj8jjzjyocr8kht8xfl7e6qb024t5a6 EBPG Preparing pieces for exposure on 5000+ SOP]
	* [https://caltech.box.com/s/s2p10a6r3ds8h8al8bejjv2yvkuc7pez EBPG 5000+ Holder 5 adapter plate SOP]		* [https://caltech.box.com/s/s2p10a6r3ds8h8al8bejjv2yvkuc7pez EBPG 5000+ Holder 5 adapter plate SOP]

Sydney: Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

2024-04-15T23:01:16Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:01, 15 April 2024
Line 29:		Line 29:

	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select EBPG 5000+ from the dropdown menu)

	===== General SOPs =====		===== General SOPs =====
	* [https://caltech.box.com/s/c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v EBPG reservation and use policy (Updated 1 October 2022)]		* [https://caltech.box.com/s/c9t6f1bkxqqfhz5lovjmm1iwg34s2m5v EBPG reservation and use policy (Updated 1 October 2022)]

Derose: /* Description */

2023-09-21T16:28:07Z

Description

← Older revision		Revision as of 16:28, 21 September 2023
Line 17:		Line 17:
	}}		}}
	== Description ==		== Description ==
	The Raith EBPG 5000+ is a dedicated direct-write Electron Beam Pattern Generator that is used to pattern large areas by high-resolution electron beam lithography. This instrument has substrate holders to handle 2, 4, and 6" wafers, piece parts from a couple of mm to 6" diameter, and 3" and 5" mask plates. While this instrument can be set to operate at 20, 50, or 100 keV, it is normally set for 100 keV operation (i.e. with an accelerating voltage of 100 kV, the average energy per electron is 100 keV).		The Raith EBPG 5000+ is a dedicated direct-write Electron Beam Pattern Generator that is used to pattern large areas by high-resolution electron beam lithography. This instrument has substrate holders to handle 2, 4, and 6" wafers, piece parts from a couple of mm to 6" diameter, and 3" and 5" mask plates. While this instrument can be set to operate at 20, 50, or 100 keV, it is normally set for 100 keV operation (i.e. with an accelerating voltage of 100 kV, the average energy per electron is 100 keV).<p>
			It is important that users have the time needed to prepare their data and job files without the pressure of being on the clock. This approach gives them a better chance of not having to repeat charged exposures through so much trial and error. Please note that we do not charge for the time required to prepare pattern files (in Layout Beamer and Tracer), or for preparing exposure job files (cjob). Users will receive instructions for secure remote access during training.
	===== Operational Applications =====		===== Operational Applications =====
	* Non-aligned electron beam lithography		* Non-aligned electron beam lithography

Derose: /* Data Preparation Resources */

2023-08-31T21:00:15Z

Data Preparation Resources

← Older revision		Revision as of 21:00, 31 August 2023
Line 88:		Line 88:
	* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]		* [https://caltech.box.com/s/ef3zou8b9xk597jxs7bs1s1yck1lo5cu App Note: Writing Time Optimization (Caltech-only access)]
	* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]		* [https://caltech.box.com/s/c8hsz4opsgb0j8nmqq48v64wnlxth5l5 App Note: Formulas in Beamer Modules (Caltech-only access)]
	* [https://caltech.box.com/s/~~wnx3fid41baefile9epmm797tbf81z59~~ App Note: Multipass (Caltech-only access)]		* [https://caltech.box.com/s/g3haulnez2ls6r2ezklcjei7jl8nx03b App Note: Multipass Exposure (Caltech-only access)]
	* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]		* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]
	* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]		* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]

Derose: /* Lithography Process Information */

2023-04-05T04:58:30Z

Lithography Process Information

← Older revision		Revision as of 04:58, 5 April 2023
Line 111:		Line 111:
	* [https://caltech.box.com/s/ji4zqki1wps2anyjy45on7cp0szvb3yk Supramolecular Resist processing (Caltech-only access)]		* [https://caltech.box.com/s/ji4zqki1wps2anyjy45on7cp0szvb3yk Supramolecular Resist processing (Caltech-only access)]
	* [https://caltech.box.com/s/jsetuvrq4ec1alqvn25pz11kmtzuw8rc Laurell Spinner cleaning SOP]		* [https://caltech.box.com/s/jsetuvrq4ec1alqvn25pz11kmtzuw8rc Laurell Spinner cleaning SOP]
			* [https://caltech.box.com/s/ybozdh0es8nzd6ujlx28lk7cnimlxwfm New Laurell Spinner WS-650Mz-23NPPB-IND Documentation (Caltech-only access)]

	===== Manufacturer Manuals =====		===== Manufacturer Manuals =====

Derose: /* Data Preparation Resources */

2023-03-17T06:02:16Z

Data Preparation Resources

← Older revision		Revision as of 06:02, 17 March 2023
Line 91:		Line 91:
	* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]		* [https://caltech.box.com/s/yh1ku02vjnf3ew8uvmjbyn8hv5t0em72 App Note: Mixed Export Options (Caltech-only access)]
	* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]		* [https://caltech.box.com/s/9wbovly55qu2plfmoian6a7ocbw7pk2h App Note: GPF Formatter (Caltech-only access)]
			* [https://www.genisys-gmbh.com/webinar-series-beamer-training.html Webinar Series - BEAMER Training]
			* [https://www.genisys-gmbh.com/webinar-series-proximity-effect-in-e-beam-lithography.html Webinar Series: Proximity Effect in E-Beam Lithography]
			* [https://www.genisys-gmbh.com/webinar-e-beam-lithography-simulation.html Webinar: e-Beam Lithography Simulation]
	* [https://caltech.box.com/s/iaq5dsl4olmj1er5gfm805hfpy4gknk9 March 2020 Genisys BEAMeeting at Caltech]		* [https://caltech.box.com/s/iaq5dsl4olmj1er5gfm805hfpy4gknk9 March 2020 Genisys BEAMeeting at Caltech]
	* [https://caltech.box.com/s/uwlcuus2wny3hoplvszazhxgb6fzzzwq June 2020 Genisys BEAMeeting Layout Beamer training video]		* [https://caltech.box.com/s/uwlcuus2wny3hoplvszazhxgb6fzzzwq June 2020 Genisys BEAMeeting Layout Beamer training video]