ATC Orion 8: Dielectric Sputter System - Revision history

Alexw: /* Electron Beam Evaporation Systems */

2026-03-19T19:30:38Z

Electron Beam Evaporation Systems

← Older revision		Revision as of 19:30, 19 March 2026
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	===== Electron Beam Evaporation Systems =====		===== Electron Beam Evaporation Systems =====
	* [[Labline: Electron Beam Evaporator\|Labline: Electron Beam Evaporator]]		* [[Labline: Electron Beam Evaporator\|Labline: Electron Beam Evaporator]]
	* [[~~CHA:~~ Electron Beam Evaporator\|~~CHA:~~ Electron Beam Evaporator]]		* [[AJA Orion ATC Series Electron Beam Evaporator\|AJA Orion ATC Series Electron Beam Evaporator]]

	===== Chemical Vapor Deposition =====		===== Chemical Vapor Deposition =====
	* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]		* [[FlexAL II: Atomic Layer Deposition (ALD)\|FlexAL II: Atomic Layer Deposition (ALD)]]
	* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]		* [[Plasma-Enhanced Chemical Vapor Deposition (PECVD)\|Plasma-Enhanced Chemical Vapor Deposition (PECVD)]]

2026-03-19T19:28:53Z

Applications

← Older revision		Revision as of 19:28, 19 March 2026
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	===== Applications =====		===== Applications =====
	* Metal and dielectric deposition		* Metal and dielectric deposition. Allows ferromagnetics and diamagnetics.
	* Surface cleaning & in-situ plasma etch		* Surface cleaning & in-situ plasma etch
	* Ion-Assisted Deposition		* Ion-Assisted Deposition

2024-04-15T23:06:51Z

Removed link to Equipment Status under Resources since the status can be viewed directly by users in FBS, per Tiffany 4/15/24 sg

← Older revision		Revision as of 23:06, 15 April 2024
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	== Resources ==		== Resources ==
	~~===== Equipment Status =====~~
	* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Dielectric_Sputter from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]		* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]

2022-06-30T05:28:27Z

Equipment Data

← Older revision		Revision as of 05:28, 30 June 2022
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	== Resources ==		== Resources ==
	===== Equipment ~~Data~~ =====		===== Equipment Status =====
	* [https://caltech.~~box~~.~~com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information~~]		* [https://labrunr.caltech.edu/Equipment_2.aspx LabRunr Equipment Status] (Select Dielectric_Sputter from the dropdown menu)

	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]		* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]

2021-04-09T00:12:13Z

Process Recipes

← Older revision		Revision as of 00:12, 9 April 2021
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	* [https://caltech.box.com/s/vbjlzmbprhw1sg3auoz1oso5clwrme87 In-situ (dielectric sputter) RF plasma etch of thermal SiO2]		* [https://caltech.box.com/s/vbjlzmbprhw1sg3auoz1oso5clwrme87 In-situ (dielectric sputter) RF plasma etch of thermal SiO2]
	* [https://caltech.box.com/s/a49yh35hkb2x5qnskivzde0y8z0o4cpn Guide to maintaining a plasma using gradual pressure changes]		* [https://caltech.box.com/s/a49yh35hkb2x5qnskivzde0y8z0o4cpn Guide to maintaining a plasma using gradual pressure changes]
			* [https://caltech.box.com/s/33nf5yz3iuebm3fkhn303rhul1hpiwie Material Deposition Overview - Indium-Tin Oxide]

	===== Video Tutorials =====		===== Video Tutorials =====

2020-12-09T03:05:55Z

Video Tutorials

← Older revision		Revision as of 03:05, 9 December 2020
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	* [https://youtu.be/y7JbzNZwZvs KNI Intro to Sputtering Presentation]		* [https://youtu.be/y7JbzNZwZvs KNI Intro to Sputtering Presentation]
	* [https://youtu.be/MlxUnwviBiI Dielectric Sputter Training]		* [https://youtu.be/MlxUnwviBiI Dielectric Sputter Training]
			* [https://youtu.be/FlSFfF8C6WQ Advanced Layer Creation - Part 1]
			* [https://youtu.be/Ymb-mZGOjgw Advanced Layer Creation - Part 2]

	===== Current Target Status =====		===== Current Target Status =====

2020-08-01T05:18:39Z

Resources

← Older revision		Revision as of 05:18, 1 August 2020
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	== Resources ==		== Resources ==
			===== Equipment Data =====
			* [https://caltech.box.com/s/lul90odaqj4rp9inb6qt2mft2ean0qqa Deposition Pass-down equipment information]
	===== SOPs & Troubleshooting =====		===== SOPs & Troubleshooting =====
	* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]		* [https://caltech.box.com/s/hhgq1sg92wttazsllqsv5yaj2yvo2tfj KNI SOP]

2020-06-25T22:52:27Z

@@ Line 38: / Line 38: @@
 * [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]
 * [https://caltech.box.com/s/sca3m472qwie0uehx6uv1strte3w2nxx QCM Deposition Rate Measurement Instructions]
 ===== Process Recipes =====

2020-03-17T00:48:12Z

← Older revision		Revision as of 00:48, 17 March 2020
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	* [https://caltech.box.com/s/6q6vh9resic35esnczpipwse1b2nlnrc Reference/supplemental Materials]		* [https://caltech.box.com/s/6q6vh9resic35esnczpipwse1b2nlnrc Reference/supplemental Materials]
	* [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]		* [https://caltech.box.com/s/1wl0hntcbzskq05im9lxdqjl0irtkir2 Sputter gun cable swap instructions]
			* [https://caltech.box.com/s/sca3m472qwie0uehx6uv1strte3w2nxx QCM Deposition Rate Measurement Instructions]

	===== Process Recipes =====		===== Process Recipes =====

2020-02-20T21:42:37Z

← Older revision		Revision as of 21:42, 20 February 2020
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	\|Model = ATC Orion 8		\|Model = ATC Orion 8
	\|Techniques = Magnetron Sputtering<br>(RF,DC, pulsed DC),<br>In-situ Plasma Etch &<br>Surface Cleaning,</br>Reactive Sputtering,<br>Co-Sputtering		\|Techniques = Magnetron Sputtering<br>(RF,DC, pulsed DC),<br>In-situ Plasma Etch &<br>Surface Cleaning,</br>Reactive Sputtering,<br>Co-Sputtering
	\|EmailList = kni-sputter~~@caltech.edu~~		\|EmailList = kni-sputter
	\|EmailListName = Sputter		\|EmailListName = Sputter
	}}		}}