KNI Staff Members

2020-03-19T18:55:00Z

Jpalmer:

{| class="wikitable" style="width: 90%;"
|-
!scope="col" style="text-align:left; width: 15%"| Name
!scope="col" style="text-align:left; width: 16%" | Job Title
!scope="col" style="text-align:left; width: 18%"| Email
!scope="col" style="text-align:left; width: 14%"| Office & Phone
!scope="col" style="text-align:left; width: 20%"| Areas of Responsibility
!scope="col" style="text-align:center;"| Photo
|-
{{StaffMemberTableItem|
|Name = Nick Chacon
|JobTitle = Laboratory Technical Staff
|CaltechID = nchacon
|Office = 303 Steele
|Phone = 626-395-5594 (office) 951-570-8458 (cell)
|AreasResponsibility = General Lab Support
|Photo = Chacon photo.jpg
}}
{{StaffMemberTableItem|
|Name = Guy A. DeRose, PhD
|JobTitle = Associate Director of Technical Operations
|CaltechID = derose
|Office = 126 Steele
|Phone = 626-395-3423 (office) 626-676-8529 (cell)
|AreasResponsibility = Electron Beam Lithography, Lab Technical Operations
|Photo = Guy-A-DeRose.jpg
}}
{{StaffMemberTableItem|
|Name = Tiffany Kimoto
|JobTitle = Associate Director of Business Operations
|CaltechID = tkimoto
|Office = 119A Steele
|Phone = 626-395-3914 (office) 626-744-9908 (fax) 310-291-7977 (cell)
|AreasResponsibility = Programs, Outreach, Communications, Financial Management
|Photo = Tiffany-Kimoto.jpg
}}
{{StaffMemberTableItem|
|Name = Bert Mendoza
|JobTitle = Laboratory Coordinator
|CaltechID = bertm
|Office = 124 Steele
|Phone = 626-395-4075 (office) 626-491-2970 (cell)
|AreasResponsibility = Lab Safety & Coordination, Wet Chemistry, Photolithography
|Photo = Bert-Mendoza.jpg
}}
{{StaffMemberTableItem|
|Name = Jennifer Palmer
|JobTitle = Administrative Lead
|CaltechID = jpalmer
|Office = 128 Steele
|Phone = 626-395-3244 (office) 626-744-9908 (fax)
|AreasResponsibility = Accounts, Billing, Purchase Orders
|Photo = Jennifer-Palmer.jpg
}}
{{StaffMemberTableItem|
|Name = Evan Piano
|JobTitle = Nanofabrication Process Engineer Intern
|CaltechID = empiano
|Office = 330 Steele
|Phone = 626-395-5732 (office)
|AreasResponsibility = Process Development, Interim Microscopy
|Photo = Evan-piano.jpg
}}
{{StaffMemberTableItem|
|Name = Nathan S. Lee
|JobTitle = Plasma Process Engineer
|CaltechID = nathslee
|Office = 319 Steele
|Phone = 626-395-1319 (office)
|AreasResponsibility = Reactive Ion Etching, Plasma-Enhanced CVD
|Photo = Nathan-S-Lee.jpg
}}
{{StaffMemberTableItem|
|Name = Alex Wertheim
|JobTitle = Materials Process Engineer
|CaltechID = alexw
|Office = 130 Steele
|Phone = 626-395-3371 (office)
|AreasResponsibility = Physical Deposition, 3D Printing, Ellipsometry
|Photo = Alex-Wertheim.jpg
}}
{{StaffMemberTableItem|
|Name = Patama Taweesup
|JobTitle = Grants Manager
|CaltechID = patama
|Office = 142B Moore
|Phone = 626-395-8542 (office)
|AreasResponsibility = Grant Management
|Photo = Patama-Taweesup.jpg
}}
|}

2020-02-20T21:54:07Z

Jpalmer:

{{InstrumentInfoboxOneImage|
|InstrumentName = Dimension Icon AFM
|HeaderColor = #F5A81C
|ImageOne = Dimension-Icon-AFM.jpg
|ImageTwo = Dimension-Icon-AFM.jpg
|InstrumentType = [[Equipment_List#Microscopy|Microscopy]]
|RoomLocation = B203B Steele
|LabPhone = 626-395-1545
|PrimaryStaff = [[Guy A. DeRose, PhD]]
|StaffEmail = derose@caltech.edu
|StaffPhone = 626-395-3423
|Manufacturer = Bruker
|Model = Dimension Icon
|Techniques = PeakForce Tapping Mode, Tapping Mode, Contact Mode, Quantitative NanoMechanics, Piezoresponse Force Microscopy, Magnetic Force Microscopy, Electrostatic Force Microscopy
|RequestTraining = derose@caltech.edu
|EmailList = kni-afm
|EmailListName = AFM
}}
== Description ==
An AFM measures a sample's topographic and other surface information by interacting a nanoscale probe with the sample. The Dimension Icon offers three main interaction modes: (1) PeakForce Tapping Mode, which operates in conjunction with Bruker's ScanAsyst® to allow the software to automatically optimize several imaging parameters for high-quality, relatively easily-obtained images; with tapping oscillations of 0.25 to 2.0 kHz, it is also capable of capturing a force curve at each pixel in order to facilitate extraction of mechanical property data using the Quantitative NanoMechanics (QNM) software package; (2) Tapping Mode, a more traditional tapping interaction that operates near the probe cantilever's resonant frequency (usually 10s to 100s of kHz) to provide topographic and phase imaging; (3) Contact Mode, for direct, constant contact between the probe and surface, which is necessary for several other surface measurement techniques.

===== Applications =====
* Topographic imaging of surface features ranging from sub-nm to several microns in height
* Roughness measurements resulting from sub-nm Z resolution
* Phase imaging to qualitatively identify different phases of material by their surface properties
* Quantitative NanoMechanics (QNM) to extract material property data from force curves (e.g. elastic modulus, adhesion, energy dissipation)
* Piezoresponse Force Microscopy (PFM)
* Magnetic Force Microscopy (MFM) using Lift Mode
* Electrostatic Force Microscopy (EFM) using Lift Mode
* Surface Potential measurements
* Measurements in liquid environments are possible
* See Bruker's Scanning Probe Microscopy Techniques [https://caltech.box.com/s/i7vmlrfk4py4wp2o6wpfek1iduigvrqr Poster]
** The KNI does not currently have modules for Scanning Tunneling, TUNA & Conductive, Scanning Spreading Resistance, Scanning Capacitance, or Scanning Thermal modes; inquire with the [https://mmrc.caltech.edu/AFM%20Dimension%20Icon/Dimension%20Icon.html MMRC at Caltech] for access to some of these advanced techniques.

== Resources ==
===== SOPs & Troubleshooting =====
* PeakForce Tapping & Tapping Mode SOPs ([https://caltech.box.com/s/d7wtme94vifmfzgqgr0t4sou2rb66n4y Short Version] | [https://caltech.box.com/s/izpbyf7udhjbm24vz9z20swi516wzaky Long Version])
* [https://caltech.box.com/s/74auo2yullutbcmnp3u1osjl4l4vwjpl Troubleshooting Guide]

===== Video Tutorials =====
* [https://youtu.be/HIaTe0Bb5xs Part 1: Setting up an Experiment & Aligning the Scanner]
* [https://youtu.be/Oq8djKI8gHM Part 2: Navigating to Sample & Explanation of Scanning Parameters]
* [https://youtu.be/1lEmg0p_uaw Part 3: Basics of Scanning & Using Analysis Software]

===== Technical Notes =====
* [https://caltech.box.com/s/mljbcq17wcwxvye53k59p9oajxa4zj3y Introduction to Bruker's ScanAsyst and PeakForce Tapping AFM Technology]

===== Presentations =====
* [https://caltech.box.com/s/giewllp5pybk4mdoj7g9jdvcsdk2jlpz Bruker's presentation on Image Quality & PeakForce Tapping]
* [https://caltech.box.com/s/giewllp5pybk4mdoj7g9jdvcsdk2jlpz Bruker's presentation on Quantitative NanoMechanics (QNM)]

===== Analysis Software =====
* [ftp://anonymous@sboftp.bruker-nano.com/outgoing/GPTech/Software/NanoScope_Analysis_x86_v190r1sr2.exe Download & Install Bruker's Analysis Software for free]
* [http://gwyddion.net/ Install free Gwyddion Software] as an alternative to Bruker's own Analysis Software

===== Manufacturer Manuals =====
* [https://caltech.box.com/s/d1xa73nzilukfok7yn38zub0yziv4pq6 Bruker Dimension Icon Instruction Manual] (Scanning Software)
* [https://caltech.box.com/s/7ui5b0tcymyhm2xzjmmwecmpgppm1oec Bruker NanoScope Analysis V150 Manual] (Analysis Software)

===== Order Your Own Probes =====
* Probes are considered consumable items that users users are responsible for investigating and purchasing themselves. ScanAsyst-Air probes are commonly used with PeakForce Tapping Mode for topographic imaging, while the selection of Tapping Mode probes relies on a number of factors related to your sample. See [http://www.brukerafmprobes.com Bruker's "Easy Product Wizard,"] for example, for some probe selection guidance.

===== Using Standard Samples =====
[[File:Bruker-AFM-Standard-Samples.jpg|thumb|right|300px|Use standard samples to help calibrate the microscope and to troubleshoot problems related to scanning and the probe]]

* Note that in order to troubleshoot scanning problems (e.g. to determine if the problem has to do with the sample, the probe, or the microscope itself), it can be helpful to scan a standard sample. The standards are located in a case underneath the AFM desk. These are the three most recommended standards; typically choose the one that is closest to your own sample:
#'''Surface Topography Reference (VGRP-15M):''' Features are 6x6 μm wide, on a 10 μm pitch, and etched 180 nm deep into SiO2. This works well to check the accuracy and morphology of step heights, and is used to periodically recalibrate the Z dimension of the AFM scanner. Note that while it does not necessarily do a good job of predicting the behavior of scans that look at features on a scale that is an order-of-magnitude or two smaller (e.g. measuring 2D material step heights), if this 180 nm calibration is within an error of less than 1%, then you can be generally confident in your small-scale scans. Consider using – or devising – a 2D material standard as a check on your own 2D material scans to be assured of accuracy.
#'''SAPPHIRE-12M" Sample (#5 in PFQNM-SMPKIT-12M Box 2/2):''' Has an Rq roughness (aka RMS roughness) on the order of 1 nm. This can be used to check the microscope performance on very flat samples, e.g. 2D materials step heights or substrate roughness. Since this is a very hard sample, consider lowering your engage force setpoint to avoid blunting your tip upon making contact (e.g. to 0.03 V or lower for the Peakforce Engage Setpoint).
#'''RS-12M Titanium Roughness Sample (#6 in PFQNM-SMPKIT-12M Box 2/2):''' Has Rq roughness of about 30 nm and can be used generally to check that you are getting good topography scans on features ranging from 10s to 100s of nm.

== Specifications ==
===== Manufacturer Specifications =====
* [https://caltech.box.com/s/7jldvrco0pymuxkluxhe8s3enkl8tcag Dimension Icon Product Guide & Data Sheet]

===== AFM Specifications =====
* Minimum Feature Size Resolved, Z: ~0.1 nm
* Minimum Feature Size Resolved, X & Y: ~2 nm
* X & Y scan range: 90 μm x 90 μm
* Z scan range: up to 10 μm
* Z noise floor: <30 pm RMS in appropriate environment (imaging bandwidth up to 625 Hz)
* Z sensor noise level(closed-loop): 35 pm RMS (imaging bandwidth up to 625 Hz); 50 pm RMS force curve bandwidth (0.1 Hz to 5 kHz)
* X & Y position noise (closed-loop): ≤0.15 nm RMS (imaging bandwidth up to 625 Hz)
* X & Y position noise (open-loop): ≤0.10 nm RMS (imaging bandwidth up to 625 Hz)
* Integral nonlinearity (X-Y-Z): <0.5%
* Sample Size: ≤210 mm diameter, ≤15 mm thick
* Motorized position stage (X-Y axis): 180 mm × 150 mm inspectable area; 2 μm repeatability, unidirectional; 3 μm repeatability, bidirectional
* Microscope optics: 5-megapixel digital camera; 180 μm to 1465 μm viewing area; Digital zoom and motorized focus
 
 
== Related Instrumentation in the KNI ==
===== Scanning Probe Microscopes =====
* [[Dimension Icon: Atomic Force Microscope (AFM) | Dimension Icon: Atomic Force Microscope (AFM)]]
* [[Dektak 3ST: Profilometer | Dektak 3ST: Profilometer]]
===== Sample Preparation for Microscopy =====
* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner | Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface]]
* [[Carbon Evaporator | Carbon Evaporator (Leica EM ACE600) to make samples conductive]]
===== Scanning Electron & Ion Microscopes =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 NanoLab: SEM, EDS & WDS]]
* [[Sirion: SEM & EDS | Sirion: SEM & EDS]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta 200F: SEM, ESEM, Lithography & Probe Station]]
* [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab: Helium, Neon & Gallium FIB]]

Sirion: SEM & EDS

2020-02-20T21:51:31Z

Jpalmer:

{{InstrumentInfoboxOneImage|
|InstrumentName = Sirion SEM
|HeaderColor = #F5A81C
|ImageOne = Sirion-SEM.jpg
|ImageTwo = Sirion-SEM.jpg
|InstrumentType = [[Equipment_List#Microscopy|Microscopy]]
|RoomLocation = B209 Steele
|LabPhone = 626-395-1541
|PrimaryStaff = [[Guy A. DeRose, PhD]]
|StaffEmail = derose@caltech.edu
|StaffPhone = 626-395-3423
|Manufacturer = FEI (now Thermo Fisher)
|Model = Sirion (aka XL-30)
|Techniques = SEM, EDS, Immersion Lens Imaging
|RequestTraining = derose@caltech.edu
|EmailList = kni-sem-fib
|EmailListName = SEM-FIB
}}
== Description ==
The Sirion is a field emission gun (FEG) scanning electron microscope (SEM) equipped with an immersion lens for imaging sub-10 nm features (so-called "ultra high resolution mode," UHR) and an energy dispersive spectroscopy (EDS) detector for compositional analysis. While it is the KNI's oldest SEM, it is also a very steady instrument, offering a lower-cost alternative to similar high-resolution imaging that is available on the newer [[Nova_600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe | Nova 600]] & [[Nova_200 NanoLab: SEM, EDS & WDS | Nova 200 NanoLab]] platforms. The smaller Sirion chamber also allows for fast pump and vent times, which makes this SEM very useful for quick inspection. See a full list of training and educational resources for this instrument below.
===== SEM Applications =====
* Ultra-High-Resolution Imaging (Immersion Mode aka UHR Mode)
* High-Resolution Imaging (Field-Free Mode aka Normal Mode)
* EDX Mode Imaging (reduces background signal on EDS spectra)
* Secondary Electron (SE) & Backscattered Electron (BSE) Imaging
* Everhart-Thornley Detector (ETD) & Through-the-Lens Detector (TLD)
===== EDS Applications =====
* Spectrum acquisition for quantitative compositional analysis
* Linescan acquisition for 1D spatial compositional analysis
* Map acquisition for 2D spatial compositional analysis

== Resources ==
===== SOPs & Troubleshooting =====
* SEM SOPs ([https://caltech.box.com/s/rontehfysbmcyia4448wi31g8gbhepz9 Short Version] | [https://caltech.box.com/s/llpi6ct5wvw6c2tnh81zu32autbi2doy Long Version])
* EDS SOPs ([https://caltech.box.com/s/ltcra2dk47k5s8r5mqotbad3i2e6r3lk Short Version] | [https://caltech.box.com/s/kukccwu1m8ekfjo6jds4jupvzwsjs3z1 Long Version])
* [https://caltech.box.com/s/u4c7ep9wyxb3tvcp0o38tczf0o8vpffi Troubleshooting Guide]
===== Video Tutorials =====
* [https://youtu.be/UfF_ljwvepQ Getting Started] | [https://youtu.be/luC-5TgNPsQ Basic SEM Alignment]
* Astigmatism Correction ([https://youtu.be/YeukVt1Fyi0 Details] | [https://youtu.be/WFfOi-rwlbA On Right-Angle Features] | [https://youtu.be/1syySgnTEqU Stigmator Alignment])
* [https://youtu.be/4V-bE6uqHY4 Eucentric Height: What it means, When to use it & How to get there]
* [https://youtu.be/R_RYbtumU20 Adjusting TLD Voltage to Capture SE vs. BSE Signal]
===== Graphical Handouts =====
* [https://caltech.box.com/s/pxl99bbc1jm1tbjshfaotm91xm0mqs1i SEM & EDS Concepts]
* [https://caltech.box.com/s/k2iy75hxiwkehv0ogqelz2sux9e1cs5k SEM Alignments]
* [https://caltech.box.com/s/ijd8gprg9gcavb6of5uegu7osinzsdet Guide to Optimizing SEM Imaging]
===== Presentations =====
* Scanning Electron Microscopy: Principles, Techniques & Applications (includes slides on EDS)
** [https://caltech.box.com/s/lulkj0pwm053akyya1shazg8wzgudq9f Pptx Slides] | [https://youtu.be/Zh21tp3aPEw YouTube Lecture]

===== Manufacturer Manuals =====
* [https://caltech.box.com/s/36j0n01ig7f757kvkiebvqjqj0el2yvp EDAX Genesis EDS Operation Manual]
===== Calibrate Measurements with NIST Standard =====
* The KNI has a NIST-traceable standard against which SEM measurements can be compared. See Slides 54-55 of the [https://caltech.box.com/s/lulkj0pwm053akyya1shazg8wzgudq9f SEM Presentation] for details. Ask staff for help finding and using the standard in the lab.
===== Simulation Software =====
* [http://www.gel.usherbrooke.ca/casino/What.html CASINO Electron Beam Simulation Software] – simulate e-beam/specimen interactions (very useful for EDS)
===== Sample Preparation =====
* Use the [[Carbon Evaporator]] to make non-conductive samples conductive by applying 2-10 nm of evaporated carbon.
* Use the [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner |
O2/Ar Plasma Cleaner]] to remove hydrocarbons from the sample surface to avoid creating dark contamination spots on your features while imaging them.
===== Order Your Own Stubs =====
* Stubs used for mounting specimens are considered a personal, consumable item in the KNI. There are some old stubs at each SEM, yet you should buy your own so that you can keep them clean and available to you. There are many stub geometries and configurations, some of which will be right for you to purchase and keep with your other cleanroom items.
** [https://www.tedpella.com/SEM_html/SEMclip.htm.aspx Buy stubs with copper clips] (recommended for most devices, especially those with non-conductive substrates)
** [https://www.tedpella.com/sem_html/SEMpinmount.htm Buy stubs without copper clips] (OK for devices with conductive substrates)
===== Guide to Choosing KNI SEMs & FIBs =====
*[[Guide to Choosing KNI SEMs & FIBs | Consult this guide for help in choosing the best SEMs and FIBs for your work]]

== Specifications ==
===== Manufacturer Specifications =====
* [https://caltech.box.com/s/s70o8bkorrygdmmyxmwazr6jyhzb11ma Sirion SEM Product Guide & Data Sheet]
===== SEM Specifications =====
* Minimum Feature Size Resolved: ~7 nm
* Voltage Range: 0.2 to 30.0 kV
* Current Range: "Spotsize" 1 to 7 (approximately 30 pA to 20 nA), with increments of 1
* Apertures: 30 μm, 40 μm, 50 μm, 100 μm
* Eucentric Height: 5 mm working distance (WD)
* Stage Range: ±25 mm X & Y travel, 50 mm Z travel, 0-45° tilt, 360° rotation
* ETD Grid Bias Range: -150 to 300 V
* TLD Bias Range: -100 to 150 V
* Ultimate Vacuum: 3e-6 mbar
 
 
== Related Instrumentation in the KNI ==
===== Scanning Electron Microscopes (SEMs) =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[Nova 200 NanoLab: SEM, EDS & WDS | Nova 200 NanoLab: SEM, EDS & WDS]]
* [[Sirion: SEM & EDS | Sirion: SEM & EDS]]
* [[Quanta 200F: SEM, ESEM, Lithography & Probe Station | Quanta 200F: SEM, ESEM, Lithography & Probe Station]]
===== Focused Ion Beam (FIB) Systems =====
* [[Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe|Nova 600 NanoLab: SEM, Ga-FIB, GIS & Omniprobe]]
* [[ORION NanoFab: Helium, Neon & Gallium FIB | ORION NanoFab: Helium, Neon & Gallium FIB]]
===== Sample Preparation for Microscopy =====
* [[Carbon Evaporator | Carbon Evaporator (Leica EM ACE600) to make samples conductive]]
* [[Tergeo Plus ICP- & CCP-RIE: Oxygen & Argon Plasma Cleaner | Oxygen & Argon Plasma Cleaner (Tergeo Plus ICP- & CCP-RIE) to remove hydrocarbons from surface]]
===== Transmission Electron Microscopes =====
* [[Tecnai TF-30: 300 kV TEM, STEM, EDS & HAADF | Tecnai TF-30: TEM, STEM, EDS & HAADF (50-300 kV)]]
* [[Tecnai TF-20: 200 kV TEM, STEM, EDS, EELS, EFTEM & Lithography | Tecnai TF-20: TEM, STEM, EDS, EELS, EFTEM & Lithography (40-200 kV)]]
===== Scanning Probe Microscopes =====
* [[Dimension Icon: Atomic Force Microscope (AFM) | Dimension Icon: Atomic Force Microscope (AFM)]]
* [[Dektak 3ST: Profilometer | Dektak 3ST: Profilometer]]